摘要:
The present invention provides a piezoelectric device having an extremely good secular characteristic, which is a unimorph (or bimorph) element obtained by sticking to a metal plate a piezoelectric single crystal having a giant-lateral-effect piezoelectric performance of a lateral-vibration-mode electromechanical coupling factor k 31 not smaller than 70%, the unimorph (or bimorph) element having a bending-vibration-mode electromechanical coupling factor k b not smaller than 50 % (or 60 %). A plate-form single crystal 10 of PZNT or PMNT is brought into a mono-domain in its thickness direction and in its plate surface so as to be provided with the giant-lateral-effect piezoelectric characteristic, and the single crystal 10 that does not cause secular deterioration is stuck to a metal plate 20 (shim plate) while the mono-domain quality is kept as it is, as a result of which a unimorph 1 (or bimorph 2) is fabricated.
摘要:
The present invention provides a piezoelectric device having an extremely good secular characteristic, which is a unimorph (or bimorph) element obtained by sticking to a metal plate a piezoelectric single crystal having a giant-lateral-effect piezoelectric performance of a lateral-vibration-mode electromechanical coupling factor k 31 not smaller than 70%, the unimorph (or bimorph) element having a bending-vibration-mode electromechanical coupling factor k b not smaller than 50 % (or 60 %). A plate-form single crystal 10 of PZNT or PMNT is brought into a mono-domain in its thickness direction and in its plate surface so as to be provided with the giant-lateral-effect piezoelectric characteristic, and the single crystal 10 that does not cause secular deterioration is stuck to a metal plate 20 (shim plate) while the mono-domain quality is kept as it is, as a result of which a unimorph 1 (or bimorph 2) is fabricated.
摘要:
A piezoelectric device includes: a substrate (1); a first conductive layer (4) formed over the substrate, the first conductive layer including at least one buffer layer (41) formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer (5) formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer (6) electrically connected with the piezoelectric layer.
摘要:
A ceramic device (10) has an actuator element (14) which includes a shape-retaining layer (24), an upper electrode (26a) formed on an upper portion of the shape-retaining layer (24), and a lower electrode (26b) formed on a lower portion of the shape-retaining layer (24); a vibrating section (20) of ceramics which supports the actuator element (14); and a fixed section (22) of ceramics which vibratingly supports the vibrating section (20). An electrode material of the lower electrode (26b) contacting the vibrating section (20) contains an additive in an amount of 0.01 % by weight to 20 % by weight. The electrode material contains platinum as a major component, for example. The additive such as zirconium oxide, cerium oxide, or titanium oxide is preferably used.
摘要:
An acceleration sensor includes: a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, and conductive protrusions made of a metal material or a ceramic material and formed by a thermal spraying process; and a holding body for holding the piezoelectric vibrator via - the conductive protrusions.