公开(公告)号：EP4501540A1

公开(公告)日：2025-02-05

申请号：EP23779143.9

申请日：2023-02-28

Applicant: NHK Spring Co., Ltd.

Inventor： FUJII, Masahiro ,  FUJINO, Daisuke ,  ARAKI, Yoshihito ,  AIKAWA, Naoya ,  FURUGORI, Nobuyuki ,  KASONO, Tomonori

IPC: B24B19/02 ,  B24B29/00 ,  B24B41/04 ,  B24B47/12

Abstract: A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface, and a second drive unit for causing the support unit to rotate synchronously with the first drive unit such that one end of a polishing member attached to the polishing tool faces in a movement direction.