公开(公告)号：EP3900867A1

公开(公告)日：2021-10-27

申请号：EP19900978.8

申请日：2019-12-13

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  FUJINO, Daisuke ,  TAKIMOTO, Masaru ,  ARAKI, Yoshihito ,  FUJII, Masahiro

IPC: B23K20/00

Abstract: A joining method according to the present invention is a joining method of joining a main body which is made of aluminum or an aluminum alloy and is formed with a passage through which a medium for promoting heat exchange is circulated and a cover which is made of aluminum or an aluminum alloy and covers the passage of the main body. The method includes: a covering step of covering the main body with the cover; and a diffusion bonding step of joining the main body and the cover by diffusion bonding under a condition in which a joining temperature is 500°C or higher and 640°C or lower, and a joining surface pressure is 0.7 MPa or higher.

公开(公告)号：EP4501540A1

公开(公告)日：2025-02-05

申请号：EP23779143.9

申请日：2023-02-28

Applicant: NHK Spring Co., Ltd.

Inventor： FUJII, Masahiro ,  FUJINO, Daisuke ,  ARAKI, Yoshihito ,  AIKAWA, Naoya ,  FURUGORI, Nobuyuki ,  KASONO, Tomonori

IPC: B24B19/02 ,  B24B29/00 ,  B24B41/04 ,  B24B47/12

Abstract: A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface, and a second drive unit for causing the support unit to rotate synchronously with the first drive unit such that one end of a polishing member attached to the polishing tool faces in a movement direction.

公开(公告)号：EP4557887A1

公开(公告)日：2025-05-21

申请号：EP23839270.8

申请日：2023-04-26

Applicant: NHK Spring Co., Ltd.

Inventor： AIKAWA, Naoya ,  KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  FUJINO, Daisuke ,  TAKANASHI, Masaya

IPC: H05B3/48

Abstract: A sheath heater includes a metal sheath, a heater wire disposed in the metal sheath, an insulating material filled in the metal sheath so as to separate the metal sheath and the heater wire, a lead wire for supplying power to the heater wire, a crimp sleeve connecting the heater wire extending from an end of the metal sheath with the lead wire, a cylindrical member covering the end of the metal sheath, and a lid member engaging with the cylindrical member and including an opening into which the lead wire is inserted. The crimp sleeve is disposed in the cylindrical member. The end of the metal sheath includes a first insulating tube including a first through hole into which the heater wire is inserted and a sealing material filling a gap between the metal sheath and the first insulating tube. The sealing material includes a ceramic binder.

公开(公告)号：EP4319483A1

公开(公告)日：2024-02-07

申请号：EP22779561.4

申请日：2022-02-09

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  FUJINO, Daisuke ,  TANI, Yuki

IPC: H05B3/10 ,  H05B3/12 ,  H05B3/48

Abstract: A sheathed heater with improved reliability is provided. Alternatively, a substrate support device including the sheathed heater with improved reliability is provided. The sheathed heater of the present invention includes a first metal wire, a first terminal connected to a first end of the first metal wire, a first conductive flexible member connected to the first terminal and connected to a second metal wire, a second terminal connected to a second end of the first metal wire, and a second conductive flexible member connected to the second terminal and connected to a third metal wire, wherein the first conductive flexible member and the second conductive flexible member are arranged adjacent to each other.

公开(公告)号：EP4319482A1

公开(公告)日：2024-02-07

申请号：EP22779521.8

申请日：2022-02-04

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUTIYA, Jun ,  FUJINO, Daisuke ,  AIKAWA, Naoya ,  WADA, Keiko ,  NAKAJIMA, Aya

IPC: H05B3/10 ,  H05B3/72 ,  H01L21/683

Abstract: A placement board according to the present invention includes: a main body unit is configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. In a state where the heater has been driven and the medium has been caused to circulate through the flow channel, a temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20°C or more.