-
公开(公告)号：EP4009024A1
公开(公告)日：2022-06-08
申请号：EP20849555.6
申请日：2020-07-27
申请人： NHK Spring Co., Ltd.
发明人： KIDA, Naoya , TATSUMI, Arata , SEKIYA, Kenji , AIKAWA, Naoya , TAKANASHI, Masaya
摘要： A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.
-
公开(公告)号：EP3370477A1
公开(公告)日：2018-09-05
申请号：EP16859467.9
申请日：2016-09-28
申请人： NHK Spring Co., Ltd.
IPC分类号： H05B3/74 , H01L21/02 , H01L21/3065 , H01L21/683 , H05B3/18
CPC分类号： H01L21/6831 , H01L21/02 , H01L21/3065 , H01L21/67017 , H01L21/67098 , H01L21/67103 , H05B3/18 , H05B3/28 , H05B3/74
摘要： A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.
-
公开(公告)号：EP3869909A1
公开(公告)日：2021-08-25
申请号：EP19873637.3
申请日：2019-10-01
申请人： NHK Spring Co., Ltd.
摘要： A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.
-
-
公开(公告)号：EP4319482A1
公开(公告)日：2024-02-07
申请号：EP22779521.8
申请日：2022-02-04
申请人： NHK Spring Co., Ltd.
发明人： KIDA, Naoya , FUTAKUTIYA, Jun , FUJINO, Daisuke , AIKAWA, Naoya , WADA, Keiko , NAKAJIMA, Aya
IPC分类号： H05B3/10 , H05B3/72 , H01L21/683
摘要： A placement board according to the present invention includes: a main body unit is configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. In a state where the heater has been driven and the medium has been caused to circulate through the flow channel, a temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20°C or more.
-
公开(公告)号：EP4009740A1
公开(公告)日：2022-06-08
申请号：EP20850532.1
申请日：2020-07-06
申请人： NHK Spring Co., Ltd.
发明人： KIDA, Naoya , TATSUMI, Arata , SEKIYA, Kenji , AIKAWA, Naoya , TAKANASHI, Masaya
IPC分类号： H05B3/10 , H05B3/18 , H05B3/48 , H05B3/68 , H01L21/205 , H01L21/3065 , H01L21/31 , C23C14/50 , C23C16/46
摘要： A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to one of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to the other of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.
-
公开(公告)号：EP3612000A1
公开(公告)日：2020-02-19
申请号：EP18785237.1
申请日：2018-04-03
申请人： NHK Spring Co., Ltd.
发明人： HANAMACHI, Toshihiko , SEKIYA, Kenji , TAKAHARA, Go , AIKAWA, Naoya , KISARA, Yuta , TATSUMI, Arata
摘要： A heater unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate and a second substrate joined together, a groove arranged on at least one join surface of the first substrate and the second substrate, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, connection terminals electrically connected with both ends of the heating wire respectively.
-
公开(公告)号：EP3115481B1
公开(公告)日：2018-10-03
申请号：EP15758220.6
申请日：2015-02-25
申请人： NHK Spring Co., Ltd.
IPC分类号： C23C24/04
CPC分类号： C23C24/04
摘要： For a laminate according to the present invention, a metallic coating is formed by accelerating copper powder containing 0.002% to 0.020% by weight of phosphorus and having been subjected to reduction treatment together with gas heated to a temperature lower than the melting point of the copper powder, spraying the copper powder onto the surface of a substrate while keeping the copper powder in the solid state, and depositing the copper powder on the substrate.
-
公开(公告)号：EP3375606A1
公开(公告)日：2018-09-19
申请号：EP16864329.4
申请日：2016-11-10
申请人： NHK Spring Co., Ltd.
IPC分类号： B32B15/01 , B05D1/12 , B05D7/24 , B22F1/00 , B22F9/08 , B32B15/02 , B32B15/04 , B32B15/20 , C04B41/90 , C22C9/00
摘要： To provide a laminate having a high heat dissipation effect, having no problem such as cracking of an insulating substrate even when a thermal load is applied, and having no void or the like in a metal film, and a method of manufacturing the laminate. A laminate according to the present invention includes an insulating substrate 10, an intermediate layer 50 formed on a surface of the substrate 10 and containing a metal or an alloy as a main component, and a circuit layer 20 that is a metal film formed of a copper powder having a hydrogen content of 0.002% by mass or less and laminated on the intermediate layer 50. In the laminate, an interface between the intermediate layer 50 and the circuit layer 20 is plastically deformed.
-
公开(公告)号：EP3866565A1
公开(公告)日：2021-08-18
申请号：EP19870485.0
申请日：2019-10-01
申请人： NHK Spring Co., Ltd.
摘要： Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.
-
-
-
-
-
-
-
-
-
搜索结果
11 条记录 (耗时 0.011 秒)
