公开(公告)号：EP4446455A1

公开(公告)日：2024-10-16

申请号：EP22904062.1

申请日：2022-11-25

Applicant: NHK Spring Co., Ltd.

Inventor： YOKOYAMA, Hibiki ,  FUTAKUCHIYA, Jun ,  KANEDA, Noriyoshi ,  SONE, Michiyoshi ,  FUJII, Masahiro ,  NAMBU, Takatoshi

IPC: C23C4/02 ,  H01L21/683

Abstract: The metal mask has a body having a first surface in contact with a surface of a workpiece, a second surface opposite the first surface and a third surface between the first surface and the second surface, and an eave portion continuous with the body portion and projecting outwards from the first surface, the eave portion being arranged away from the surface of the workpiece. The third surface (side surface) of the body portion of the metal mask may have a stepped portion formed of the eave portion. The third surface (side surface) of the body part has an inclined surface that extends from the first surface to the second surface and may have a structure in which the eave portion is arranged above the inclined surface.

公开(公告)号：EP4502225A1

公开(公告)日：2025-02-05

申请号：EP23779146.2

申请日：2023-02-28

Applicant: NHK Spring Co., Ltd.

Inventor： HIRANO, Satoshi ,  TAKAHARA, Go ,  NAMBU, Takatoshi ,  KANEDA, Noriyoshi ,  YOKOYAMA, Hibiki ,  SONE, Michiyoshi

IPC: C23C4/12

Abstract: This rotary device comprises a rotary stage detachably supporting a base material having an inlet and an outlet for a liquid at a predetermined temperature, and a flow path connecting the inlet to the outlet, a rotary support which supports a rotary table, a rotary mechanism which rotates the rotary support, and a liquid supply part which supplies the liquid to the base material. The rotary stage has a liquid supply port for supplying the liquid to the base material, and a liquid discharge port for discharging the liquid from the base material. The rotary support has therein a first pipe connected to the liquid supply port, and a second pipe connected to the liquid discharge port. In addition, the thermal spraying apparatus comprises the rotary device and a thermal spray gun.