公开(公告)号：EP4319483A1

公开(公告)日：2024-02-07

申请号：EP22779561.4

申请日：2022-02-09

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  FUJINO, Daisuke ,  TANI, Yuki

IPC: H05B3/10 ,  H05B3/12 ,  H05B3/48

Abstract: A sheathed heater with improved reliability is provided. Alternatively, a substrate support device including the sheathed heater with improved reliability is provided. The sheathed heater of the present invention includes a first metal wire, a first terminal connected to a first end of the first metal wire, a first conductive flexible member connected to the first terminal and connected to a second metal wire, a second terminal connected to a second end of the first metal wire, and a second conductive flexible member connected to the second terminal and connected to a third metal wire, wherein the first conductive flexible member and the second conductive flexible member are arranged adjacent to each other.