公开(公告)号：EP4009024A1

公开(公告)日：2022-06-08

申请号：EP20849555.6

申请日：2020-07-27

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: G01K1/16 ,  G01K7/02

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.

公开(公告)号：EP4456121A1

公开(公告)日：2024-10-30

申请号：EP22910829.5

申请日：2022-12-02

Applicant: NHK Spring Co., Ltd.

Inventor： OTSUKA, Yusuke ,  KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  KANEDA, Noriyoshi ,  YOKOYAMA, Hibiki ,  SONE, Michiyoshi ,  SAKAMOTO, Hiroki

IPC: H01L21/683 ,  B32B9/04 ,  B32B15/04 ,  B32B15/20 ,  C23C14/50 ,  H01L21/205 ,  H01L21/31

Abstract: A laminate structure of the invention is a laminate structure for a semiconductor manufacturing device, and includes a substrate containing aluminum and including a first face, an intermediate layer arranged on the first face of the substrate and containing aluminum oxide, and a cover layer arranged on the intermediate layer and containing metal atoms. The intermediate layer includes a partition wall forming a plurality of voids in a cross-sectional shape parallel to the first face. The intermediate layer includes a boundary layer covering the first face of the substrate. The cover layer is arranged in some of the plurality of voids in the intermediate layer. The plurality of voids includes voids adjacent to the boundary layer and separated from the cover layer.

公开(公告)号：EP4557887A1

公开(公告)日：2025-05-21

申请号：EP23839270.8

申请日：2023-04-26

Applicant: NHK Spring Co., Ltd.

Inventor： AIKAWA, Naoya ,  KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  FUJINO, Daisuke ,  TAKANASHI, Masaya

IPC: H05B3/48

Abstract: A sheath heater includes a metal sheath, a heater wire disposed in the metal sheath, an insulating material filled in the metal sheath so as to separate the metal sheath and the heater wire, a lead wire for supplying power to the heater wire, a crimp sleeve connecting the heater wire extending from an end of the metal sheath with the lead wire, a cylindrical member covering the end of the metal sheath, and a lid member engaging with the cylindrical member and including an opening into which the lead wire is inserted. The crimp sleeve is disposed in the cylindrical member. The end of the metal sheath includes a first insulating tube including a first through hole into which the heater wire is inserted and a sealing material filling a gap between the metal sheath and the first insulating tube. The sealing material includes a ceramic binder.

公开(公告)号：EP4319483A1

公开(公告)日：2024-02-07

申请号：EP22779561.4

申请日：2022-02-09

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  FUJINO, Daisuke ,  TANI, Yuki

IPC: H05B3/10 ,  H05B3/12 ,  H05B3/48

Abstract: A sheathed heater with improved reliability is provided. Alternatively, a substrate support device including the sheathed heater with improved reliability is provided. The sheathed heater of the present invention includes a first metal wire, a first terminal connected to a first end of the first metal wire, a first conductive flexible member connected to the first terminal and connected to a second metal wire, a second terminal connected to a second end of the first metal wire, and a second conductive flexible member connected to the second terminal and connected to a third metal wire, wherein the first conductive flexible member and the second conductive flexible member are arranged adjacent to each other.

公开(公告)号：EP4319482A1

公开(公告)日：2024-02-07

申请号：EP22779521.8

申请日：2022-02-04

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUTIYA, Jun ,  FUJINO, Daisuke ,  AIKAWA, Naoya ,  WADA, Keiko ,  NAKAJIMA, Aya

IPC: H05B3/10 ,  H05B3/72 ,  H01L21/683

Abstract: A placement board according to the present invention includes: a main body unit is configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. In a state where the heater has been driven and the medium has been caused to circulate through the flow channel, a temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20°C or more.

公开(公告)号：EP4213183A1

公开(公告)日：2023-07-19

申请号：EP21866441.5

申请日：2021-08-06

Applicant: NHK Spring Co., Ltd.

Inventor： YOKOYAMA, Hibiki ,  KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  KANEDA, Noriyoshi ,  SONE, Michiyoshi

IPC: H01L21/3065 ,  H01L21/683

Abstract: A stage includes a base material including a step portion and an insulating film. The step portion includes a first surface recessed from a top surface of the base material and a second surface recessed from a side surface of the base material. The insulating film includes a plurality of first layers on the first surface and a plurality of second layers on the second surface. In the step portion, each first end portion of the plurality of first layers and each second end portion of the plurality of second layers are alternately stacked. The first surface and the second surface are connected via a corner, and each first end portion and each second end portion are alternately stacked at the corner.

公开(公告)号：EP4009740A1

公开(公告)日：2022-06-08

申请号：EP20850532.1

申请日：2020-07-06

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/10 ,  H05B3/18 ,  H05B3/48 ,  H05B3/68 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/31 ,  C23C14/50 ,  C23C16/46

Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to one of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to the other of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.