公开(公告)号：EP0868974B1

公开(公告)日：2003-03-19

申请号：EP98105973.6

申请日：1998-04-01

申请人： NIPPEI TOYAMA CORPORATION

发明人： Nishi, Kenichiro, c/o Nippei Toyama Corporation ,  Nukui, Mitsuru, c/o Nippei Toyama Corporation ,  Murai, Shirou, c/o Nippei Toyama Corporation ,  Nakajima, Kazuo, c/o Nippei Toyama Corporation ,  Wada, Toyotaka, c/o Nippei Toyama Corporation

IPC分类号： B24B37/04 ,  B24B41/06 ,  B24B47/22 ,  B24B7/17 ,  H01L21/00 ,  B24B41/047 ,  B24B41/00

CPC分类号： B24B37/04 ,  B24B41/06 ,  B24B47/22

公开(公告)号：EP1043120A1

公开(公告)日：2000-10-11

申请号：EP00106850.1

申请日：2000-03-30

申请人： NIPPEI TOYAMA CORPORATION

发明人： Nukui, Mitsuru, c/o Nippei Toyama Corporation ,  Takata, Michihiro, c/o Nippei Toyama Corporation ,  Kaga, Muneaki, c/o Nippei Toyama Corporation ,  Murai, Shirou, c/o Nippei Toyama Corporation ,  Okuyama, Tetsuo, c/o Nippei Toyama Corporation ,  Wada, Toyotaka, c/o Nippei Toyama Corporation

IPC分类号： B24B9/06

CPC分类号： B24B9/065 ,  B24B41/005 ,  B24B47/20

摘要： A workpiece (23) formed of a circular thin plate is rotated about its center as an axis (L1). Each of disk-shaped rotating grinding wheels (27) and (28), while being rotated about an axis (L3) extending in a direction substantially parallel to the plane of the workpiece (23) and perpendicular to the radial direction of the workpiece (23), is made to undergo relative feeding movement on both obverse and reverse surface sides of the workpiece (23) along an outer peripheral edge portion (23a) of the workpiece (23). Consequently, the outer peripheral edge portion (23a) of the workpiece (23) is ground by an outer peripheral surface of each of the rotating grinding wheels (27) and (28). In this case, it is preferred that two grinding wheels (27) and (28) for rough grinding and finish grinding be provided as the disk-shaped rotating grinding wheels, and that rough grinding and finish grinding are performed by the same station.

摘要翻译： 由圆形薄板形成的工件（23）以其中心为轴线（L1）旋转。 每个盘状旋转砂轮（27）和（28）在绕基本上平行于工件（23）的平面并垂直于工件的径向方向的轴线（L3）上旋转的同时， 23）沿着工件（23）的外周边缘部分（23a）在工件（23）的正面和反面两侧进行相对进给运动。 因此，通过每个旋转砂轮（27）和（28）的外周面研磨工件（23）的外周缘部（23a）。 在这种情况下，优选设置用于粗磨和精磨的两个砂轮（27）和（28）作为盘形旋转砂轮，并且由同一台进行粗磨和精磨。

公开(公告)号：EP0868974A2

公开(公告)日：1998-10-07

申请号：EP98105973.6

申请日：1998-04-01

申请人： NIPPEI TOYAMA CORPORATION

发明人： Nishi, Kenichiro, c/o Nippei Toyama Corporation ,  Nukui, Mitsuru, c/o Nippei Toyama Corporation ,  Murai, Shirou, c/o Nippei Toyama Corporation ,  Nakajima, Kazuo, c/o Nippei Toyama Corporation ,  Wada, Toyotaka, c/o Nippei Toyama Corporation

IPC分类号： B24B37/04 ,  B24B41/06 ,  B24B47/22

CPC分类号： B24B37/04 ,  B24B41/06 ,  B24B47/22

摘要： A workpiece receiving hole 60a for fittingly receiving a workpiece 17 is formed in the center of a rotary disk 60 which is thinner than the workpiece 17. A workpiece drive section 60b which engages a notch 17a formed for the purpose of orienting the workpiece 17 relative to crystal orientation is formed along the brim of the hole 60a. A gear 59 is rotated by a gear 62 of a motor 61, thereby rotating the rotary disk 60 and imparting torque to the workpiece 17. Accordingly, both surfaces of the workpiece are ground by means of a double disc surface grinder.

摘要翻译： 在与工件17相比更薄的旋转盘60的中心处形成有用于装配工件17的工件接收孔60a。工件驱动部分60b，其与形成为用于使工件17相对于 沿着孔60a的边缘形成晶体取向。 齿轮59通过马达61的齿轮62旋转，从而旋转旋转盘60并将扭矩赋予工件17.因此，通过双盘表面研磨机研磨工件的两个表面。