公开(公告)号：EP3151065A4

公开(公告)日：2018-05-09

申请号：EP15800335

申请日：2015-05-11

申请人： NIPPON LIGHT METAL CO

发明人： KOHMURA KAZUO ,  ONO YOSUKE ,  TANEICHI DAIKI ,  SATO YASUYUKI ,  HIROTA TOSHIAKI ,  KOGA KIYOKAZU

IPC分类号： G03F1/64 ,  B65D85/86 ,  G03F1/62

CPC分类号： G03F1/64 ,  G03F1/62 ,  G03F1/66 ,  G03F7/70691 ,  G03F7/70866 ,  G03F7/70916 ,  G03F7/70975 ,  G03F7/70983

摘要： Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.