摘要:
The present invention provides a positive type resist composition which has excellent photosensitivity in light decomposition. The composition comprises;
(a) a polymer having at least 70 % of isotactic construction, prepared from polymerizable monomers, at least a portion of which is a (meth)acrylate monomer having a group selected from the class consisting of a t-butyl group, a benzyl group, an alpha-methylbenzyl group, an alpha, alpha-dimethylbenzyl group and a trityl group, and (b) a photoactivator which generates an acid in response to a light irradiation.
The present invention also provides a resist composition into which, instead of the polymer (a), a polymer (c) is formulated which has at least 70 % of isotactic construction and is prepared from polymerizable monomers, at least a portion of which is a hydroxyl styrene selected from the class consisting of p-t-butoxycarbonyloxystyrene, p-t-butoxycarbonyloxy-alpha-methyl-styrene, t-butyl-p-vinyl benzoate and t-butyl-p-isopropenylphenyloxy acetate.
摘要:
Disclosed is a polymer prepared from an α,β-ethylenic unsaturated compound, characterized by having a structure represented by the following general formula (1):
(where, R¹ and R², which are the same or different, represent a C1 - C4 alkyl group, m is an integer of 1 - 10 and n is 0, 1 or 2) in the molecule.
摘要:
A graft copolymer having a plurality of polymer side chains is disclosed. The starting backbone polymer is a homopolymer or copolymer of a styrene derivative having a pendant vinylidene group on the benzene ring. The graft copolymer may be produced by metallizing said backbone polymer with an alkali metal and then polymerizing an ethylenically unsaturated monomer in the presence of the metallized polymer as an anionic polymerization initiator.
摘要:
A graft copolymer having a plurality of polymer side chains is disclosed. The starting backbone polymer is a homopolymer or copolymer of a styrene derivative having a pendant vinylidene group on the benzene ring. The graft copolymer may be produced by metallizing said backbone polymer with an alkali metal and then polymerizing an ethylenically unsaturated monomer in the presence of the metallized polymer as an anionic polymerization initiator.