公开(公告)号：EP0484021A1

公开(公告)日：1992-05-06

申请号：EP91309659.0

申请日：1991-10-18

申请人： NIPPON PAINT CO., LTD.

发明人： Ohata, Masatoshi ,  Yamamoto, Masaharu

IPC分类号： G03F7/039 ,  G03F7/075 ,  C08F2/50 ,  C08F20/18 ,  C08F12/22

CPC分类号： G03F7/039 ,  G03F7/075

摘要： The present invention provides a positive type resist composition which has excellent photosensitivity in light decomposition. The composition comprises;

(a) a polymer having at least 70 % of isotactic construction, prepared from polymerizable monomers, at least a portion of which is a (meth)acrylate monomer having a group selected from the class consisting of a t-butyl group, a benzyl group, an alpha-methylbenzyl group, an alpha, alpha-dimethylbenzyl group and a trityl group, and
(b) a photoactivator which generates an acid in response to a light irradiation.

The present invention also provides a resist composition into which, instead of the polymer (a), a polymer (c) is formulated which has at least 70 % of isotactic construction and is prepared from polymerizable monomers, at least a portion of which is a hydroxyl styrene selected from the class consisting of p-t-butoxycarbonyloxystyrene, p-t-butoxycarbonyloxy-alpha-methyl-styrene, t-butyl-p-vinyl benzoate and t-butyl-p-isopropenylphenyloxy acetate.

摘要翻译： 本发明提供一种在光分解中具有优异的光敏性的正型抗蚀剂组合物。 组合物包含 （a）由可聚合单体制备的具有至少70％全同立构构型的聚合物，其至少一部分是（甲基）丙烯酸酯单体，其具有选自叔丁基，苄基 ，α-甲基苄基，α，α-二甲基苄基和三苯甲基，和（b）响应于光照射而产生酸的光活化剂。 本发明还提供一种抗蚀剂组合物，代替聚合物（a），配制聚合物（c），其具有至少70％的全同立构构型，并由可聚合单体制备，其中至少一部分为 选自对叔丁氧羰基氧基苯乙烯，对叔丁氧羰基氧基-α-甲基苯乙烯，叔丁基对乙烯基苯甲酸酯和叔丁基对异丙烯基苯氧基乙酸酯的羟基苯乙烯。

公开(公告)号：EP0541227A1

公开(公告)日：1993-05-12

申请号：EP92308342.2

申请日：1992-09-14

申请人： Nippon Paint Co., Ltd.

发明人： Yamamoto, Masaharu ,  Ohata, Masatoshi

IPC分类号： C08F230/08 ,  C09C3/12

CPC分类号： B82Y30/00 ,  C01P2004/20 ,  C01P2004/32 ,  C01P2004/61 ,  C01P2004/64 ,  C01P2006/12 ,  C01P2006/90 ,  C08F230/08 ,  C09C3/12

摘要： Disclosed is a polymer prepared from an α,β-ethylenic unsaturated compound, characterized by having a structure represented by the following general formula (1):

(where, R¹ and R², which are the same or different, represent a C1 - C4 alkyl group, m is an integer of 1 - 10 and n is 0, 1 or 2) in the molecule.

摘要翻译： 公开了由a，b-烯属不饱和化合物制备的聚合物，其特征在于具有由以下通式（1）表示的结构：（其中R 1和R 2相同） 或不同的，分子中表示C1-C4烷基，m为1-10的整数，n为0,1或2）。