公开(公告)号：EP2263078B1

公开(公告)日：2015-05-13

申请号：EP09727454.2

申请日：2009-03-19

Applicant: NXP B.V.

Inventor： GRIDELET, Evelyne ,  WIDDERSHOVEN, Franciscus ,  GARCIA TELLO, Pablo ,  LAMBERT, Magali

IPC: G01N27/22 ,  G01N33/487 ,  G01N33/543

CPC classification number: G01N33/5438 ,  G01N27/226

公开(公告)号：EP2263078A1

公开(公告)日：2010-12-22

申请号：EP09727454.2

申请日：2009-03-19

Applicant: NXP B.V.

Inventor： GRIDELET, Evelyne ,  WIDDERSHOVEN, Franciscus ,  GARCIA TELLO, Pablo ,  LAMBERT, Magali

IPC: G01N27/22 ,  G01N33/487 ,  G01N33/543

CPC classification number: G01N33/5438 ,  G01N27/226

Abstract: A sensor chip (100) for detecting particles, the sensor chip (100) comprising a substrate (102), an electric connection structure (104) arranged in a surface portion of the substrate (102) and adapted for an electric connection to an electric connection element (106), a sensor active region (108) arranged in another surface portion of the substrate (102) and being sensitive to the presence of the particles to be detected, and a continuous dielectric layer (110) covering the substrate (102) including covering the electric connection structure (104) and the sensor active region (108).

公开(公告)号：EP2331920B1

公开(公告)日：2012-07-25

申请号：EP09787185.9

申请日：2009-09-12

Applicant: NXP B.V.

Inventor： HIJZEN, Erwin ,  LAMBERT, Magali

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/2803

Abstract: Disclosed is an integrated circuit (100) comprising a substrate (110) carrying a plurality of light-sensitive elements (112) and a blazed grating (120) comprising a plurality of diffractive elements (122) for diffracting respective spectral components (123-125) of incident light (150) to respective light-sensitive elements (112), the blazed grating (120) comprising a stack of layers, at least some of these layers comprising first portions, e.g. metal portions (202, 222, 242) arranged such that each diffractive element (122) comprises a stepped profile of stacked first portions with a first portion in a higher layer laterally extending beyond a first portion in a lower layer of said stepped profile.

公开(公告)号：EP2331920A1

公开(公告)日：2011-06-15

申请号：EP09787185.9

申请日：2009-09-12

Applicant: NXP B.V.

Inventor： HIJZEN, Erwin ,  LAMBERT, Magali

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/2803

Abstract: Disclosed is an integrated circuit (100) comprising a substrate (110) carrying a plurality of light-sensitive elements (112) and a blazed grating (120) comprising a plurality of diffractive elements (122) for diffracting respective spectral components (123-125) of incident light (150) to respective light-sensitive elements (112), the blazed grating (120) comprising a stack of layers, at least some of these layers comprising first portions, e.g. metal portions (202, 222, 242) arranged such that each diffractive element (122) comprises a stepped profile of stacked first portions with a first portion in a higher layer laterally extending beyond a first portion in a lower layer of said stepped profile.