公开(公告)号：EP4407066A1

公开(公告)日：2024-07-31

申请号：EP22872891.1

申请日：2022-09-20

Applicant: National Institute for Materials Science

Inventor： NAGAOKA Katsumi ,  AIZAWA Takashi ,  OHMI Shun-ichiro

IPC: C23C14/06 ,  B32B18/00 ,  B82Y30/00 ,  B82Y40/00 ,  C23C14/58 ,  C23C16/38 ,  H01J9/04 ,  H01J37/06

CPC classification number: B32B18/00 ,  B82Y30/00 ,  B82Y40/00 ,  C23C14/06 ,  C23C14/58 ,  C23C16/38 ,  H01J9/04 ,  H01J37/06

Abstract: The purpose of the present invention, relating to lanthanide boride, which is known as a low work function material, is to provide a novel low work function material with low chemical reactivity, in particular a low work function material of which the material surface, after being exposed to atmospheric gases, can be cleaned at a heating temperature lower than in the prior art. The present invention is a laminate containing a lanthanide boride film formed on a substrate, the surface of said film being covered by a thin film, wherein the thin film is a monatomic layer of a hexagonal boron nitride thin film.