公开(公告)号：EP1793410A1

公开(公告)日：2007-06-06

申请号：EP04822204.6

申请日：2004-11-09

申请人： National University Corporation Nara Institute of Science and Technology ,  JEOL Ltd.

发明人： DAIMON, Hiroshi ,  MATSUDA, Hiroyuki ,  KATO, Makoto ,  KUDO, Masato

IPC分类号： H01J37/244 ,  H01J37/285 ,  H01J37/12 ,  G01N23/227

CPC分类号： H01J37/12 ,  G01N23/227 ,  H01J37/153 ,  H01J37/244 ,  H01J37/285 ,  H01J49/067 ,  H01J49/48 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2522

摘要： A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.

摘要翻译： 具有椭圆形形状或接近椭圆形的形状的网格（M）在电极（EL1）电极间（EL1到ELN）附连到。 后级电极（EL2到ELN）的电压被适当地设定。 利用这种布置，由目（M）产生的本地负球面像差与正球面像差抵消。 这对优化电场分布。 其结果是，这实现了对静电透镜，其接受角延伸到约±60°。