公开(公告)号：EP1793410A1

公开(公告)日：2007-06-06

申请号：EP04822204.6

申请日：2004-11-09

申请人： National University Corporation Nara Institute of Science and Technology ,  JEOL Ltd.

发明人： DAIMON, Hiroshi ,  MATSUDA, Hiroyuki ,  KATO, Makoto ,  KUDO, Masato

IPC分类号： H01J37/244 ,  H01J37/285 ,  H01J37/12 ,  G01N23/227

CPC分类号： H01J37/12 ,  G01N23/227 ,  H01J37/153 ,  H01J37/244 ,  H01J37/285 ,  H01J49/067 ,  H01J49/48 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2522

摘要： A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.

摘要翻译： 具有椭圆形形状或接近椭圆形的形状的网格（M）在电极（EL1）电极间（EL1到ELN）附连到。 后级电极（EL2到ELN）的电压被适当地设定。 利用这种布置，由目（M）产生的本地负球面像差与正球面像差抵消。 这对优化电场分布。 其结果是，这实现了对静电透镜，其接受角延伸到约±60°。

公开(公告)号：EP1793410B1

公开(公告)日：2012-06-13

申请号：EP04822204.6

申请日：2004-11-09

申请人： National University Corporation Nara Institute of Science and Technology ,  JEOL Ltd.

发明人： DAIMON, Hiroshi, ,  MATSUDA, Hiroyuki ,  KATO, Makoto, ,  KUDO, Masato,

IPC分类号： H01J37/153 ,  H01J49/48 ,  H01J49/06 ,  G01N23/227 ,  H01J37/12 ,  H01J37/244 ,  H01J37/285

CPC分类号： H01J37/12 ,  G01N23/227 ,  H01J37/153 ,  H01J37/244 ,  H01J37/285 ,  H01J49/067 ,  H01J49/48 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2522

摘要： A mesh (M) having a shape of a spheroidal surface or a shape near to it is arranged on an electrode (EL1) among electrodes (EL1 to ELn) and voltage of the electrodes (EL2 to ELn) of the latter stages are appropriately set so that a local negative spherical aberration generated by the mesh (M) is compensated by a positive spherical aberration generated by a focusing electric field, thereby forming an optimal electric field distribution. By this, it is possible to realize an electrostatic lens having an intake angle enlarged up to the order of ± 60 degrees.

公开(公告)号：EP3324421A1

公开(公告)日：2018-05-23

申请号：EP16824509.0

申请日：2016-07-13

申请人： National University corporation Nara Institute of Science and Technology

发明人： MATSUI, Fumihiko ,  MATSUDA, Hiroyuki

IPC分类号： H01J37/12 ,  H01J37/05 ,  H01J37/075 ,  H01J37/09 ,  H01J37/244 ,  H01J37/252 ,  H01J37/305 ,  H01J43/24

CPC分类号： H01J37/05 ,  H01J37/075 ,  H01J37/09 ,  H01J37/12 ,  H01J37/244 ,  H01J37/252 ,  H01J37/305 ,  H01J43/24

摘要： Provided is a compact device which captures, over a large solid angle range, electrically charged particles emitted from a point source and parallelizes the trajectories of said charged particles. The present invention is configured from: an electrostatic lens comprising a plurality of axisymmetric electrodes (10-14) and an axisymmetric aspherical mesh (2) which has a surface that is concave away from the point source; and a flat collimator plate (3) positioned coaxially with the electrostatic lens. The acceptance angle for the electrically charged particles generated from a point source (7) is ±30° or greater. The shape of the aspherical mesh (2), and the potentials and the positions of a ground electrode (10) and application electrodes (11-15) are adjusted so that the trajectories of the electrically charged particles are substantially parallelized by the electrostatic lens. The electrostatic lens and the flat collimator plate are positioned on a common axis so that after the trajectories of the electrically charged particles have been substantially parallelized with respect to the axis, the charged particles enter the flat collimator plate (3) at an angle of incidence substantially perpendicular thereto.

公开(公告)号：EP2058834A1

公开(公告)日：2009-05-13

申请号：EP07791379.6

申请日：2007-07-26

申请人： National University Corporation Nara Institute of Science and Technology

发明人： MATSUDA, Hiroyuki ,  DAIMON, Hiroshi

IPC分类号： H01J37/153 ,  H01J37/12 ,  H01J37/285

CPC分类号： H01J37/12 ,  H01J37/252 ,  H01J2237/05 ,  H01J2237/153 ,  H01J2237/1532 ,  H01J2237/244 ,  H01J2237/2511 ,  H01J2237/2538

摘要： A spherical aberration correction decelerating lens corrects a spherical aberration occurring in an electron beam or an ion beam (hereinafter, referred to as "beam") emitted from a predetermined object plane position with a certain divergence angle, and said spherical aberration correction decelerating lens comprises at least two electrodes, each of which is constituted of a surface of a solid of revolution whose central axis coincides with an optical axis and each of which receives an intentionally set voltage applied by an external power supply, wherein at least one of the electrodes includes one or more meshes (M) which has a concaved shape opposite to an object plane (P0) and which is constituted of a surface of a solid of revolution so that a central axis of the concaved shape coincides with the optical axis, and a voltage applied to each of the electrodes causes the beam to be decelerated and causes formation of a decelerating convergence field for correcting the spherical aberration occurring in the beam. This makes it possible to provide a spherical aberration correction decelerating lens which converges a beam, emitted from the sample and having high energy and a large divergence angle, onto an image plane.

摘要翻译： 球面像差校正减速透镜校正球面像差在电子束或离子束从以一定的发散角的预定对象平面位置发出的光（通过向称为“束”后开始，）发生状况，并且所述球面像差校正减速透镜包括 至少两个电极，每个的所有其构成的旋转实体，其中心轴的的一个表面的与光轴一致，并且每个都接收到有意设定的电压由外部电源施加，worin所述电极中的至少一个包括 一个或多个网格（M）其中在目标平面（P0）具有形状相反的凹到和所有其构成的旋转体的表面的这样做的凹入形状的中心轴与光轴和电压一致 施加到每个电极的使光束被减速，并且使形成的减速会聚磁场的矫正球面Aberra 重刑的光束发生的。 这使得有可能提供一种球面像差校正透镜减速会聚的光束，从样品和具有高能量和大的发散角射出到图像平面上。

公开(公告)号：EP3792950A1

公开(公告)日：2021-03-17

申请号：EP19799637.4

申请日：2019-05-08

申请人： National University corporation Nara Institute of Science and Technology

发明人： MATSUDA, Hiroyuki ,  DAIMON, Hiroshi ,  Toth Laszlo

IPC分类号： H01J37/12 ,  G01N23/2273 ,  G01N23/2276 ,  H01J37/153 ,  H01J37/252

摘要： Provided is a compact two-dimensional electron spectrometer that is capable of variably adjusting the deceleration ratio over a wide range, and performing simultaneous measurement of the two-dimensional emission angle distribution with a high energy resolution over a wide solid angle of acquisition. The two-dimensional electron spectrometer is configured from: a variable deceleration ratio spherical aberration correction electrostatic lens; a cylindrical mirror type energy analyzer or a wide angle energy analyzer; and a projection lens. The variable deceleration ratio spherical aberration correction electrostatic lens is configured from: an electrostatic lens that consists of an axially symmetric spherical mesh having a concave shape with respect to a point source, and one or a plurality of axially symmetrical electrodes, and that adjusts the spherical aberration of charged particles generated from the point source; and an axially symmetric deceleration field generating electrode that is placed coaxially with the electrostatic lens.

公开(公告)号：EP2058834B1

公开(公告)日：2015-12-09

申请号：EP07791379.6

申请日：2007-07-26

申请人： National University Corporation Nara Institute of Science and Technology

发明人： MATSUDA, Hiroyuki ,  DAIMON, Hiroshi

IPC分类号： H01J37/153 ,  H01J37/12 ,  H01J37/285

CPC分类号： H01J37/12 ,  H01J37/252 ,  H01J2237/05 ,  H01J2237/153 ,  H01J2237/1532 ,  H01J2237/244 ,  H01J2237/2511 ,  H01J2237/2538