专利检索 ap:("National University Corporation Nara Institute of Science AND Technology" OR "JEOL Ltd.") AND inv:"KATO, Makoto," 第 1 页

1.

发明授权
SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, INPUT LENS, ELECTRON SPECTROSCOPIC DEVICE, PHOTOELECTRON MICROSCOPE, AND MEASUREMENT SYSTEM 有权
标题翻译：静电透镜校正球面像差，输入镜头，电子分光设备，光电子显微镜和测量系统

公开(公告)号：EP1793410B1

公开(公告)日：2012-06-13

申请号：EP04822204.6

申请日：2004-11-09

申请人： National University Corporation Nara Institute of Science and Technology , JEOL Ltd.

发明人： DAIMON, Hiroshi, , MATSUDA, Hiroyuki , KATO, Makoto, , KUDO, Masato,

IPC分类号： H01J37/153 , H01J49/48 , H01J49/06 , G01N23/227 , H01J37/12 , H01J37/244 , H01J37/285

CPC分类号： H01J37/12 , G01N23/227 , H01J37/153 , H01J37/244 , H01J37/285 , H01J49/067 , H01J49/48 , H01J2237/2448 , H01J2237/24485 , H01J2237/2522

摘要： A mesh (M) having a shape of a spheroidal surface or a shape near to it is arranged on an electrode (EL1) among electrodes (EL1 to ELn) and voltage of the electrodes (EL2 to ELn) of the latter stages are appropriately set so that a local negative spherical aberration generated by the mesh (M) is compensated by a positive spherical aberration generated by a focusing electric field, thereby forming an optimal electric field distribution. By this, it is possible to realize an electrostatic lens having an intake angle enlarged up to the order of ± 60 degrees.