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    APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
    2.
    发明公开
    APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES 审中-公开

    公开(公告)号：EP3968353A1

    公开(公告)日：2022-03-16

    申请号：EP20195445.0

    申请日：2020-09-10

    Applicant: Impedans Ltd

    Inventor： Scullion, Paul ,  DOYLE, James ,  LENNON, JJ ,  GAHAN, David ,  Tigran, POGHOSYAN

    IPC: H01J37/32 ,  H01J49/48 ,  H01L21/66

    Abstract: An apparatus (100) for obtaining ion energy distribution measurements in a plasma processing system (105) comprising a substrate (101) for placement in the plasma processing system and that is exposed to the plasma, an ion energy analyser (201) disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, G 0 , a second conductive grid, G 1 , a third conductive grid, G 2 , a fourth conductive grid G 3 , and a collection electrode, C, each grid separated by an insulating layer (205-207) and an insulation layer (209) also provided beneath the collector, wherein G 1 is biased with a negative potential relative to G 0 , G 2 is biased with a positive voltage sweep relative to G 0 and G 3 is biased negatively with respect to the collector G 4 and G 4 is biased negatively with respect to G 0 , a rechargeable battery power supply including control circuitry, integrated in the substrate, for supplying voltage to each of the grids and the collector of the ion energy analyser; and a Faraday shield encasing the ion energy analyser, the power supply and the control circuitry.

    MULTI-REFLECTING TIME-OF-FLIGHT MASS SPECTROMETER WITH ISOCHRONOUS CURVED ION INTERFACE
    3.
    发明授权
    MULTI-REFLECTING TIME-OF-FLIGHT MASS SPECTROMETER WITH ISOCHRONOUS CURVED ION INTERFACE 有权
    具有等时曲率离子界面的多反射飞行时间质谱仪

    公开(公告)号：EP1866951B1

    公开(公告)日：2018-01-17

    申请号：EP06748558.1

    申请日：2006-03-22

    Applicant: LECO CORPORATION

    Inventor： VERENTCHIKOV, Anatoli N. ,  YAVOR, Mikhail

    IPC: H01J49/48 ,  H01J49/40

    CPC classification number: H01J49/408 ,  H01J49/406 ,  H01J49/48

    Abstract: The present invention relates generally to a multi-reflecting time-of-flight mass spectrometer (MR TOF MS). To improve mass resolving power of a planar MR TOF MS, a spatially isochronous and curved interface may be used for ion transfer in and out of the MR TOF analyzer. One embodiment comprises a planar grid-free MR TOF MS with periodic lenses in the field-free space, a linear ion trap for converting ion flow into pulses and a C-shaped isochronous interface made of electrostatic sectors. The interface allows transferring ions around the edges and fringing fields of the ion mirrors without introducing significant time spread. The interface may also provide energy filtering of ion packets. The non-correlated turn-around time of ion trap converter may be reduced by using a delayed ion extraction from the ion trap and excessive ion energy is filtered in the curved interface.

    Analyser arrangement for particle spectrometer
    4.
    发明授权
    Analyser arrangement for particle spectrometer 有权
    AnalilatoranordnungfürTeilchenspektrometer

    公开(公告)号：EP2851933B1

    公开(公告)日：2016-10-19

    申请号：EP14185601.3

    申请日：2012-03-06

    Applicant: Scienta Omicron AB

    Inventor： Wannberg, Björn

    IPC: H01J49/06 ,  H01J37/05 ,  H01J49/48 ,  G01N23/227

    CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

    Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample (11), e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system (13), and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance (8) of the measurement region (3) can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample (11). This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

    Abstract translation: 本发明涉及一种用于确定与从粒子发射样品（11）发射的带电粒子有关的至少一个参数的方法，例如， 与能量，起始方向，起始位置或颗粒的旋转相关的参数。 该方法包括以下步骤：通过透镜系统（13）将带电粒子束引导到测量区域的入口，以及在测量区域内检测指示所述至少一个参数的粒子的位置。 此外，该方法包括以下步骤：在粒子束进入测量区域之前，在相同的坐标方向上将粒子束偏转至少两次。 因此，能够以在某种程度上不需要对样品（11）的物理操作的方式来控制测量区域（3）的入口（8）处的粒子束的位置和方向。 这又允许样品被有效地冷却，使得能量测量中的能量分辨率可以得到改善。

    Tandem plasma mass filter
    10.
    发明公开
    Tandem plasma mass filter 有权
    串联等离子体质谱过滤器

    公开(公告)号：EP1220293A3

    公开(公告)日：2003-08-20

    申请号：EP01201375.1

    申请日：2001-04-13

    Applicant: Archimedes Technology Group, Inc.

    Inventor： Ohkawa, Tihiro

    IPC: H01J49/48 ,  H01J49/28 ,  B01D59/44

    CPC classification number: H01J49/328 ,  B03C1/023 ,  B03C1/288 ,  H01J49/46

    Abstract: The present invention pertains generally to devices and apparatus which are capable of separating charged particles and plasma according to the respective masses and in particular provides a plasma mass filter for separating low-mass particles from high-mass particles which comprises a cylindrical shaped wall. A plasma mass filter (10) for separating low-mass particles from high-mass particles which comprises a cylindrical shaped wall (12) surrounding a chamber (14), said chamber defining a longitudinal axis, said cylindrical shaped wall (12) having a first end and a second end and being formed with at least on chamber inlet (30) positioned substantially midway therebetween, means for generating a magnetic field in said chamber, said magnetic field being aligned substantially parallel to said longitudinal axis, means for generating an electric field substantially perpendicular to said magnetic field to create crossed magnetic and electric fields, said electric field having a positive potential on said longitudinal axis and a substantially zero potential on said wall, means for injecting (33) a vaporised material through said chamber inlet (30) and into said chamber, and means for ionising (38) said vaporised material in said chamber to create a multi-species plasma in said chamber to interact with said crossed magnetic and electric fields for ejecting said high-mass particles into said wall and for confining said low-mass particles in said chamber during transit therethrough to separate said low-mass particles from said high-mass particles.

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