INTERFEROMETRIC IMAGING SYSTEM
    1.
    发明公开
    INTERFEROMETRIC IMAGING SYSTEM 失效
    干涉成像系统

    公开(公告)号:EP0419517A4

    公开(公告)日:1992-01-15

    申请号:EP89906596

    申请日:1989-05-24

    发明人: DULMAN, LEV

    摘要: A quality control system (100) provides for realtime, high-speed, high-resolution comparison of the three-dimensional form of a sample (201) with an exemplar (203). The system includes a sample analyzer (103), an exemplar analyzer (105), a comparator (107), a controller (101), and a position memory (109). The sample analyzer includes a sample imager (111), a sample scanner (113), and a sample transducer (115). The exemplar analyzer includes exemplar imager (117), exemplar scanner (119), and exemplar transducer (121).