Abstract:
Disclosed is an SiO deposition material characterized by having a hydrogen gas content of not more than 50 ppm. By using such an SiO deposition material, occurrence of splash can be suppressed when SiO is deposited on a base, and there can be formed an SiO deposited film which is excellent in transparency and barrier properties. By carrying out degasification so that the hydrogen gas content of a raw material Si powder for the deposition material is not more than 10 ppm, the SiO deposition material having a hydrogen gas content of not more than 50 ppm can be produced highly efficiently at low cost. Consequently, this method for producing SiO can be widely applied to methods for producing deposition materials for packaging materials which have transparency and barrier properties and are used for foods, medical products, medicinal products and the like.
Abstract:
Disclosed is SiO or an SiO deposition material characterized by having a hydrogen gas content of not less than 120 ppm. Also disclosed is an SiO deposition material characterized by having a hydrogen gas content of not less than 150 ppm. By using such materials, the film forming rate can be increased when SiO is deposited on a base, thereby efficiently forming an SiO deposited film. By setting the hydrogen gas content of a raw material Si powder to 30 ppm or higher, the sublimation rate can be increased when SiO is produced, thereby efficiently producing it at low cost. Consequently, this method for producing SiO can be widely applied to methods for producing deposition materials for packaging materials having transparency and barrier properties which are used for foods, medical products, medicinal products and the like, and methods for producing deposition materials for electrode materials of lithium batteries having an SiO deposited film.