SiO DEPOSITION MATERIAL, RAW MATERIAL Si POWDER, AND METHOD FOR PRODUCING SiO DEPOSITION MATERIAL
    4.
    发明公开
    SiO DEPOSITION MATERIAL, RAW MATERIAL Si POWDER, AND METHOD FOR PRODUCING SiO DEPOSITION MATERIAL 有权
    SIO沉积材料,Si原料粉末原料及其制备方法SIO分离材料

    公开(公告)号:EP1795624A4

    公开(公告)日:2009-07-22

    申请号:EP05770381

    申请日:2005-08-09

    CPC classification number: C01B33/113 C23C14/10

    Abstract: Disclosed is an SiO deposition material characterized by having a hydrogen gas content of not more than 50 ppm. By using such an SiO deposition material, occurrence of splash can be suppressed when SiO is deposited on a base, and there can be formed an SiO deposited film which is excellent in transparency and barrier properties. By carrying out degasification so that the hydrogen gas content of a raw material Si powder for the deposition material is not more than 10 ppm, the SiO deposition material having a hydrogen gas content of not more than 50 ppm can be produced highly efficiently at low cost. Consequently, this method for producing SiO can be widely applied to methods for producing deposition materials for packaging materials which have transparency and barrier properties and are used for foods, medical products, medicinal products and the like.

    SiO DEPOSITION MATERIAL, Si POWDER FOR SiO RAW MATERIAL, AND METHOD FOR PRODUCING SiO
    8.
    发明公开
    SiO DEPOSITION MATERIAL, Si POWDER FOR SiO RAW MATERIAL, AND METHOD FOR PRODUCING SiO 审中-公开
    SIO沉积材料,SI粉SIO原材料及其制造方法SIO

    公开(公告)号:EP1792874A4

    公开(公告)日:2009-07-22

    申请号:EP05770377

    申请日:2005-08-09

    CPC classification number: C01B33/113 C23C14/10

    Abstract: Disclosed is SiO or an SiO deposition material characterized by having a hydrogen gas content of not less than 120 ppm. Also disclosed is an SiO deposition material characterized by having a hydrogen gas content of not less than 150 ppm. By using such materials, the film forming rate can be increased when SiO is deposited on a base, thereby efficiently forming an SiO deposited film. By setting the hydrogen gas content of a raw material Si powder to 30 ppm or higher, the sublimation rate can be increased when SiO is produced, thereby efficiently producing it at low cost. Consequently, this method for producing SiO can be widely applied to methods for producing deposition materials for packaging materials having transparency and barrier properties which are used for foods, medical products, medicinal products and the like, and methods for producing deposition materials for electrode materials of lithium batteries having an SiO deposited film.

Patent Agency Ranking