Abstract:
Disclosed is a method for economically forming a uniform titanium oxide film on the surface of a base. Specifically, an aqueous titanium tetrachloride solution having a Ti content of 0.1-17% by weight is applied over the surface of a heat-resistant base in a film form. The aqueous titanium tetrachloride solution in the liquid film form is then heated to a temperature not less than 300˚C, thereby volatilizing H2O and HCl in the liquid film and forming a titanium oxide film. In case where the base is composed of a material such as aluminum that is poor in acid resistance, an acid-resistant coating film such as an oxide film is formed in advance on the surface of the metal base.
Abstract:
A photocatalyst composite material having a titanium oxide photocatalyst coating film on the surface of a base is produced by a CVD method wherein a TiCl4 vapor is reacted with a water vapor. The TiCl4 vapor and the water vapor are sprayed into a deposition chamber (9) respectively from nozzles (5) and (6) so that the spray streams of these vapors meet and thus are mixed with each other before reaching the base. The mixed vapor is brought into contact with a base (1) which is moving in one direction within 3 seconds from the mixing. It is preferable to spray the TiCl4 vapor from a porous nozzle (5) in a direction opposite to the moving direction of the base while it is preferable to spray the water vapor from a slit nozzle (6) whose crossing angle to the base is smaller than that of the porous nozzle (5).