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公开(公告)号：EP0756118A3
公开(公告)日：1997-02-05
申请号：EP96302056.5
申请日：1996-03-26
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L 1 , L 2 , ...) for feeding plural types of fluid (G 1 , G 2 ,...) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L 1 , L 2 ,...) for switching the fluids (G 1 , G 2 ,...) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译： 流体控制系统及其阀组件用于精确控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和用于将多种类型的流体（G1，G2，...）供给到处理装置（C）中的多个分支控制线（L1，L2，...） 主控制管路和多个阀组件（V），所述多个阀组件（V）结合在用于切换供给到处理装置（C）中的流体（G1，G2，...）的分支控制管路（L1，L2，...）中。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和电磁阀（V“），电磁阀（V”）在单个外壳中基本上没有软管地连接到流体驱动阀 （V'）以将工作流体（A）供给到流体压力致动器（1）中。
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公开(公告)号：EP0859155A2
公开(公告)日：1998-08-19
申请号：EP98102554.7
申请日：1998-02-13
发明人： Ohmi, Tadahiro , Morokoshi, Hiroshi , Yamaji, Michio , Tanaka, Shigeaki , Hirao, Keiji , Kawano, Yuki , Hirose, Takashi , Yokoyama, Kosuke , Kuramochi, Michio , Hatano, Masayuki , Ikeda, Nobukazu
IPC分类号： F15B1/00
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
摘要翻译： 设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开关装置具有二通阀， 三通阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。 所有类型的开关装置的双口阀的主体构造相同，并且在其底面具有入口和出口。 所有类型的开 - 关装置的三通阀的主体具有相同的结构，并且在其底面中形成有入口，始终与入口连通的出口和入口 - 出口开口。
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公开(公告)号：EP0877170B1
公开(公告)日：2003-06-18
申请号：EP98108114.4
申请日：1998-05-05
发明人： Ohmi, Tadahiro , Yamaji, Michio , Shinohara, Tsutomu , Itoi, Shigeru , Hirao, Keiji , Kawano, Yuji , Tanaka, Shigeaki , Yokoyama, Kosuke , Morokoshi, Hiroshi , Ikeda, Nobukazu
CPC分类号： F16K27/003 , F16L39/00
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公开(公告)号：EP0756118B1
公开(公告)日：2002-05-22
申请号：EP96302056.5
申请日：1996-03-26
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
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公开(公告)号：EP1170086A1
公开(公告)日：2002-01-09
申请号：EP01122278.3
申请日：1997-06-02
CPC分类号： B23K9/0953 , B23K31/12 , B23K2201/06
摘要： The invention relates to a method of automatically tightening up pipe joints with a tightening machine (24), which is characterized by the steps of checking where the tightening data is proper and accumulating predetermined values of tightening conditions, actual tightening data and result of checking by means of a tightening data processor (25) provided in the tightening machine (24), and accumulating the tightening data and the result of checking by a host computer (4) connected to the processor (25) by a communication means.
摘要翻译： 本发明涉及一种利用拧紧机器（24）自动拧紧管接头的方法，其特征在于以下步骤：检查拧紧数据适当的位置并且累积预定值的拧紧条件，实际拧紧数据和检查结果 （24）中设置的紧固数据处理器（25）的装置，并且通过通信装置累积紧固数据和由连接到处理器（25）的主计算机（4）的检查结果。
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公开(公告)号：EP0859155A3
公开(公告)日：1999-07-28
申请号：EP98102554.7
申请日：1998-02-13
发明人： Ohmi, Tadahiro , Morokoshi, Hiroshi , Yamaji, Michio , Tanaka, Shigeaki , Hirao, Keiji , Kawano, Yuki , Hirose, Takashi , Yokoyama, Kosuke , Kuramochi, Michio , Hatano, Masayuki , Ikeda, Nobukazu
IPC分类号： F15B1/00
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
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公开(公告)号：EP0877170A1
公开(公告)日：1998-11-11
申请号：EP98108114.4
申请日：1998-05-05
发明人： Ohmi, Tadahiro , Yamaji, Michio , Shinohara, Tsutomu , Itoi, Shigeru , Hirao, Keiji , Kawano, Yuji , Tanaka, Shigeaki , Yokoyama, Kosuke , Morokoshi, Hiroshi , Ikeda, Nobukazu
CPC分类号： F16K27/003 , F16L39/00
摘要： A coupling (104,80) comprises a holding member (40) having a U-shaped cross section, and a channel member (41,101) held by the holding member. The holding member (40) has an upper wall (81) formed with screw bores (84) for use in attaching the holding member to a fluid controller. The channel member (41,101) comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection (92) communicating with the inner channel of the body and having an upper end (92) inserted in a through bore (85) in the upper wall (81) of the holding member (41,101) to communicate with a downward channel of the fluid controller, and a tubular lateral projection (94) communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange (93), and the through bore of the upper wall of the holding member has an inward flange (85a) for supporting the flange.
摘要翻译： 联轴器（104,80）包括具有U形横截面的保持构件（40）和由保持构件保持的通道构件（41,101）。 保持构件（40）具有形成有用于将保持构件附接到流体控制器的螺钉孔（84）的上壁（81）。 通道构件（41,101）包括具有内部通道并装配在保持构件的上壁和其下壁之间的空间中的主体，与主体的内部通道连通的管状向上突起（92），并且具有 插入在保持构件（41,101）的上壁（81）中的通孔（85）中的上端（92）与流体控制器的向下通道连通，以及与内部连通的管状横向突起（94） 身体通道并横向延伸。 通道构件的上端具有向外的凸缘（93），并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘（85a）。
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公开(公告)号：EP0756118A2
公开(公告)日：1997-01-29
申请号：EP96302056.5
申请日：1996-03-26
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L 1 , L 2 , ...) for feeding plural types of fluid (G 1 , G 2 ,...) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L 1 , L 2 ,...) for switching the fluids (G 1 , G 2 ,...) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译： 流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和多个分支控制线（L1，L2，...），用于将多种类型的流体（G1，G2，...）馈送到耦合到 主控制线和并入用于切换供给到处理装置（C）中的流体（G1，G2，...）的分支控制线路（L1，L2，...）中的多个阀组件（V）。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动阀的电磁阀（V“） （V'）以将工作流体（A）进料到流体压力致动器（1）中
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9.发明公开Method for generating moisture, reactor for generating moisture, method for controlling temperature of reactor generating moisture, and method for forming platinium-coated catalyst layer 失效用于产生水分的方法，用于产生水分的反应器，用于控制产生水分的反应器的温度的方法以及用于形成镀铂催化剂层的方法
公开(公告)号：EP1911723A2
公开(公告)日：2008-04-16
申请号：EP08075053.2
申请日：1997-01-27
申请人： FUJIKIN Inc. , Ohmi, Tadahiro
发明人： Ohmi, Tadahiro , Kawada, Koji , Tanabe, Yoshikazu Kabushiki-Kaisha Hitachi , Nitta, Takahisa Kabushiki-Kaisha Hitachi , Ikeda, Nobukazu , Morimoto, Akihiro , Hirao, Keiji , Morokoshi, Hiroshi , Minami, Yukio
CPC分类号： C01B5/00
摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.
摘要翻译： 本发明进一步减小了用于从氧气和氢气中产生水的反应器的尺寸和成本，提供了安全，稳定和连续地实际使用所需量的高纯度水，并允许形成在内壁上的铂涂覆的催化剂层 的反应器体以长时间保持高催化活性。 具体而言，反应器包括由耐热材料制成并具有用于水/湿气的入口和出口的主体，具有设置在主体的内部空间中的气体扩散部件，并且在内部具有铂涂层 身体的墙壁表面。 从入口供给的氢和氧通过气体扩散部件扩散，然后与铂涂层接触以增强反应性，从而由氢和氧生成水。 用于产生水分的反应器的温度保持在低于氢或含氢气体的引燃温度，其中氢与高温下的氧反应以产生水分，使得氢与氧反应，同时防止爆炸燃烧 的氢和氧。 反应器主体内壁上的涂铂催化剂层是通过处理主体内壁表面，清洗处理过的表面，在壁表面上形成氧化物或氮化物非金属材料的阻挡涂层 ，并在阻挡涂层上形成铂涂层。
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10.发明公开Method for generating moisture, reactor for generating moisture, method for controlling temperature of reactor for generating moisture, and method for forming platinum-coated catalyst layer 失效一种用于生产水分过程中，反应器用于产生湿气，该反应器用于产生湿气的温度控制的方法，以及用于生产的镀铂催化剂层
公开(公告)号：EP1911722A2
公开(公告)日：2008-04-16
申请号：EP08075052.4
申请日：1997-01-27
申请人： FUJIKIN Inc. , Ohmi, Tadahiro
发明人： Ohmi, Tadahiro , Kawada, Koji , Tanabe, Yoshikazu , Nitta, Takahisa , Ikeda, Nobukazu , Morimoto, Akihiro , Hirao, Keiji , Morokoshi, Hiroshi , Minami, Yukio
IPC分类号： C01B5/00
CPC分类号： C01B5/00
摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.
摘要翻译： 本发明进一步减小了尺寸和用于产生由氧气和氢气水的反应器的成本，提供了高纯度的水到所需量实际使用安全，稳定地和连续地，并允许形成在到内壁上的镀铂催化剂层 反应器主体的在一段长时间内保持高的催化活性。 具体地，该反应器包括一个由耐热材料制成，并在入口和出口，用于水/水分气体具有主体，具有气体扩散构件在所述主体的内部空间中设置于，并且具有铂在内部涂覆上 主体的壁面上。 氢气和氧气从所述入口供给由气体扩散构件扩散，然后与铂涂层接触，以提高反应性，从而由氢气和氧气产生水。 该反应器用于产生湿气，worin氢的温度在高温下与氧反应生成的水分，被保持为低于氢或含氢气体，从而也氢进行反应与氧气的燃点温度，同时防止爆炸燃烧 的氢气和氧气。 在反应器主体的内壁涂覆铂的催化剂层通过处理所述体的内壁的表面上，清洗处理过的表面，在壁表面上形成的氧化物或氮化物的非金属材料构成的阻挡涂布形成 ，以及形成在该阻挡涂层的铂涂层。
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