OPTICAL MEASURING METHOD, AND OPTICAL MEASURING SYSTEM

    公开(公告)号:EP4431888A1

    公开(公告)日:2024-09-18

    申请号:EP21963334.4

    申请日:2021-11-08

    Inventor: SHIMODA, Kensaku

    CPC classification number: G03H1/04 G01B11/24 G01J9/02 G01N21/45 G03H1/08

    Abstract: An optical measurement method includes: preparing an optical system for recording a hologram caused by modulating, with a reference beam, an object beam obtained by illumination of a sample with illumination light, the reference beam being coherent to the illumination light; arranging a calibration unit on an optical path of the illumination light in a state where there is no sample, the calibration unit including an optical system that produces a known optical wave distribution; recording a first hologram caused while the calibration unit is producing an optical wave distribution; and calculating information about an optical wave distribution of the reference beam based on information indicating a position where the calibration unit is arranged, the known optical wave distribution, and the first hologram.

    OPTICAL MEASUREMENT SYSTEM AND OPTICAL MEASUREMENT METHOD

    公开(公告)号:EP4269938A1

    公开(公告)日:2023-11-01

    申请号:EP21910856.0

    申请日:2021-12-22

    Inventor: SHIMODA, Kensaku

    Abstract: An optical measurement system capable of suppressing noise and realizing more accurate measurement is provided. The optical measurement system includes a light source, an image sensor, and an optical system including a beam splitter that divides light from the light source into first light and second light. The optical system can configure a first optical system that records with the image sensor, a first hologram resulting from modulation of first light with second light while there is no sample, the second light being diverging light, and a second optical system that records with the image sensor, a second hologram resulting from modulation with second light, of light obtained by illumination of a sample with first light. The second optical system includes a restriction mechanism that restricts spread of the light obtained by illumination of the sample with first light to be kept within a predetermined range.

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