公开(公告)号：EP0581376A1

公开(公告)日：1994-02-02

申请号：EP93202172.8

申请日：1993-07-22

申请人： Philips Electronics N.V.

发明人： Khan, Babar Ali ,  Cammack, David Alan ,  Pinker, Ronald ,  Taskar, Nikhil Ramesh

IPC分类号： H01J61/30 ,  H01J9/26

CPC分类号： G02F1/133617 ,  H01J9/00 ,  H01J9/261 ,  H01J17/492 ,  H01J61/00 ,  H01J61/30 ,  H01J61/82 ,  H01J65/00 ,  H01S3/03 ,  H01S3/097 ,  H01S3/0973

摘要： A high pressure gas discharge lamp and the method of making same utilizing integrated circuit fabrication techniques. The lamp is manufactured from heat and pressure resistant planar substrates (14,12) in which cavities (20,22) are etched, by integrated circuit manufacturing techniques, so as to provide a cavity forming the gas discharge tube. Electrodes (40,42) are deposited in the cavity. The cavity is filled with gas discharge materials such as mercury vapor, sodium vapor or metal halide. The substrates are wafer bonded together and channels (46) may be etched in the substrate so as to provide a means for connection to the electrodes. Electrodeless RF activated lamps may also be fabricated by this technique. Micro-lasers may also be fabricated by this technique as well.

摘要翻译： 一种高压气体放电灯及其利用集成电路制造技术的方法。 该灯由通过集成电路制造技术蚀刻空腔（20,22）的耐热和耐压平面基板（14,12）制成，以提供形成气体放电管的空腔。 电极（40,42）沉积在空腔中。 空腔填充有气体放电材料，例如汞蒸气，钠蒸气或金属卤化物。 衬底被晶片结合在一起，并且可以在衬底中蚀刻通道（46），以便提供用于连接到电极的装置。 也可以通过该技术制造无电极RF激活灯。 微激光也可以通过这种技术制造。