公开(公告)号：EP4130862A1

公开(公告)日：2023-02-08

申请号：EP21776652.6

申请日：2021-03-17

申请人： Phoenix Electric Co., Ltd.

发明人： INOUE, Tomohiko ,  YAMASHITA, Kenichi ,  MATSUMOTO, Hiromu ,  IKEDA, Tomihiko

IPC分类号： G02F1/1337

摘要： To provide a light irradiation device for an exposure apparatus allowing implementation of photo-alignment process with a simple configuration.
A light irradiation device 10 is configured using a light source 12 with a plurality of LEDs 16, and a polarizing element 14 that receives light L from the light source 12 and applies the light L transmitted through the polarizing element 14 to a workpiece X. An optical axis CL of each of the LEDs 16 is set in such a manner as to have a first angle θ1 to the workpiece X. A second angle θ2 as an angle half of a light distribution angle of the light L emitted from each of the LEDs 16 is set smaller than the first angle θ1.