LIGHT IRRADIATION DEVICE, AND EXPOSURE APPARATUS PROVIDED THEREWITH

    公开(公告)号:EP4130862A1

    公开(公告)日:2023-02-08

    申请号:EP21776652.6

    申请日:2021-03-17

    IPC分类号: G02F1/1337

    摘要: To provide a light irradiation device for an exposure apparatus allowing implementation of photo-alignment process with a simple configuration.
    A light irradiation device 10 is configured using a light source 12 with a plurality of LEDs 16, and a polarizing element 14 that receives light L from the light source 12 and applies the light L transmitted through the polarizing element 14 to a workpiece X. An optical axis CL of each of the LEDs 16 is set in such a manner as to have a first angle θ1 to the workpiece X. A second angle θ2 as an angle half of a light distribution angle of the light L emitted from each of the LEDs 16 is set smaller than the first angle θ1.

    LED LAMP AND LIGHTING DEVICE INCLUDING THE SAME

    公开(公告)号:EP3477182A1

    公开(公告)日:2019-05-01

    申请号:EP18201525.5

    申请日:2018-10-19

    摘要: An LED lamp (50) includes a plurality of LEDs (52) and a pillar (54) that is defined by a polygonal cross-sectional shape and includes a plurality of lateral surfaces on which the plurality of LEDs (52) are disposed. Additionally, a pillar radius ratio (D) is set to fall in a range of greater than or equal to 3.73% and less than or equal to 18.25%. The pillar radius ratio (D) is defined as a dimensional ratio of a pillar radius (S) to a radius of an opening (22) of a reflector (12) made in shape of a bowl. The pillar radius (S) is defined as a distance from a center point (C) of the pillar (54) to each of the plurality of lateral surfaces. The reflector (12) includes a reflective surface (20) on an inner side thereof so as to reflect rays of light emitted from the LED lamp (50), and causes the rays of light reflected by the reflective surface (20) to be irradiated from the opening (22).

    LED LAMP
    4.
    发明公开
    LED LAMP 有权

    公开(公告)号:EP3366990A1

    公开(公告)日:2018-08-29

    申请号:EP18154844.7

    申请日:2018-02-02

    摘要: A light emitting diode lamp (10) is composed of a reflective mirror (12), a pillar (32) and a plurality of light emitters (30) disposed in radial arrangement about a focal point (F) of the reflective mirror (12) on the surface of the pillar (32). Each of the plurality of light emitters (30) is composed of a light emitting diode (34) and a lens (36) forming a virtual image (I) in a position of the focal point (F) located behind the light emitting diode (34). Additionally, a plurality of light emitting diode elements (40) composing the light emitting diode (34) in each of the plurality of light emitters (30) emit light rays with the same wavelength, and the light emitting diodes (34) in the plurality of light emitters (30) emit the light rays with at least two types of wavelength.