公开(公告)号：EP1374004A2

公开(公告)日：2004-01-02

申请号：EP02706478.1

申请日：2002-02-28

申请人： Porter Instrument Company, Inc.

发明人： PORTER, George, K. ,  WOLF, Seth B. ,  ALBRECHT, Charles, W.

IPC分类号： G05D7/06

CPC分类号： F22B27/16 ,  B01F3/022 ,  B01F3/04049 ,  B01F5/0413 ,  B01F2215/0096 ,  B67D2210/0006 ,  C23C16/4481 ,  C23C16/4486 ,  F16K27/003 ,  F22B27/14 ,  Y10T137/87885

摘要： A flow controller (46) is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer procession chamber. The flow controller includes a base (16) with a seamless slot (18) formed in a face thereof, providing a predictable pressure drop. The seamless slot (18) is in fluidic communication with a sensor channel (52) extending downwardly from the seamless slot first having temperature sensors (57) thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such (57) that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.