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公开(公告)号：EP1363745B1
公开(公告)日：2006-10-25
申请号：EP02709749.2
申请日：2002-02-28
IPC分类号： B05B7/04
CPC分类号： F22B27/16 , B01F3/022 , B01F3/04049 , B01F5/0413 , B01F2215/0096 , B67D2210/0006 , C23C16/4481 , C23C16/4486 , F16K27/003 , F22B27/14 , Y10T137/87885
摘要： An atomizer is provided for combining a precise mass of atomized liquid into a gas stream. The atomizer includes a mixing slot (62) formed in a face of a base member (16d). The mixing slot (62) comprises a throat in fluid communication with a gas inlet side having a smoothly decreasing cross-sectional area and a mixture outlet side (88) having a smoothly increasing cross-sectional area. A gas stream enters the mixing slot (62) via gas inlet side (84) and a liquid enters the mixing slot (64) via a liquid inlet (80) in fluid communication with the throat of the mixing slot (62). The mixing slot (62) is sealed by a sealing member abutting the face of the base member (16d) with the mixing slot (62) in it. The liquid is atomized and combined with a gas stream by venturi effect.
摘要翻译： 雾化器用于将精确质量的雾化液体组合成气流。 雾化器包括形成在基座构件（16d）的表面中的混合槽（62）。 混合槽（62）包括与具有平滑减小的横截面积的气体入口侧和具有平滑增加的横截面积的混合物出口侧（88）流体连通的喉部。 气流经由气体入口侧（84）进入混合槽（62），并且液体经由与混合槽（62）的喉部流体连通的液体入口（80）进入混合槽（64）。 混合槽（62）由一个密封件密封，该密封件与基础件（16d）的面上具有混合槽（62）。 通过文丘里效应将液体雾化并与气流合并。
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公开(公告)号：EP1363745A2
公开(公告)日：2003-11-26
申请号：EP02709749.2
申请日：2002-02-28
IPC分类号： B05B7/04
CPC分类号： F22B27/16 , B01F3/022 , B01F3/04049 , B01F5/0413 , B01F2215/0096 , B67D2210/0006 , C23C16/4481 , C23C16/4486 , F16K27/003 , F22B27/14 , Y10T137/87885
摘要： An atomizer is provided for combining a precise mass of atomized liquid into a gas stream. The atomizer includes a mixing slot (62) formed in a face of a base member (16d). The mixing slot (62) comprises a throat in fluid communication with a gas inlet side having a smoothly decreasing cross-sectional area and a mixture outlet side (88) having a smoothly increasing cross-sectional area. A gas stream enters the mixing slot (62) via gas inlet side (84) and a liquid enters the mixing slot (64) via a liquid inlet (80) in fluid communication with the throat of the mixing slot (62). The mixing slot (62) is sealed by a sealing member abutting the face of the base member (16d) with the mixing slot (62) in it. The liquid is atomized and combined with a gas stream by venturi effect.
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公开(公告)号：EP1374004A2
公开(公告)日：2004-01-02
申请号：EP02706478.1
申请日：2002-02-28
IPC分类号： G05D7/06
CPC分类号： F22B27/16 , B01F3/022 , B01F3/04049 , B01F5/0413 , B01F2215/0096 , B67D2210/0006 , C23C16/4481 , C23C16/4486 , F16K27/003 , F22B27/14 , Y10T137/87885
摘要： A flow controller (46) is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer procession chamber. The flow controller includes a base (16) with a seamless slot (18) formed in a face thereof, providing a predictable pressure drop. The seamless slot (18) is in fluidic communication with a sensor channel (52) extending downwardly from the seamless slot first having temperature sensors (57) thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such (57) that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.
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