公开(公告)号：EP0981710A4

公开(公告)日：2003-08-13

申请号：EP98923623

申请日：1998-05-20

申请人： REDWOOD MICROSYSTEMS INC

发明人： HENNING ALBERT KARL ,  ZDEBLICK MARK ,  FITCH JOHN STUART ,  HOPKINS DEAN ALLYN JR ,  LILLY LESLIE JOE

IPC分类号： B81B3/00 ,  B81C1/00 ,  F15C5/00 ,  F16K31/00 ,  F16K31/02 ,  F16K31/126 ,  F16K99/00 ,  F25B41/04 ,  F25B41/06

CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K31/002 ,  F16K31/126 ,  F16K99/0015 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0098 ,  F25B41/062 ,  F25B2341/0651 ,  F25B2400/15 ,  Y02B30/72 ,  Y10T137/6606

摘要： A thermopneumatic valve comprises a fluid channel plate (30) defining a fluid port. A diaphragm plate (28) is attached to the fluid channel plate. The diaphragm plate includes a displaceable diaphragm (44) to selectively obstruct the fluid port of the fluid channel plate. A thermal isolating heater (22) is connected to the diaphragm plate. The thermal isolating heater includes a thermal isolating heater body with a heating surface, a perimeter wall defining an extended axial cavity to confine a thermopneumatic working fluid (40) that is used to control the position of the displaceable diaphragm and a diaphragm obstruction structure (46) to limit the motion of the displaceable diaphragm into the extended axial cavity.