公开(公告)号：EP2289097A1

公开(公告)日：2011-03-02

申请号：EP09765641.7

申请日：2009-06-19

申请人： RENA GmbH

发明人： POTOFEEW, Vitalij ,  BAREIS, Dirk ,  KALTENBACH, Konrad ,  DELAHAYE, Franck

IPC分类号： H01L21/677

CPC分类号： H01L21/67784

摘要： The present invention relates to methods and devices for transporting substantially flat, freely movable objects, wherein at least the holding and guiding of the same is carried out solely through the use of a flowing liquid. The device according to the invention comprises at least one treatment surface having at least one flow region comprising a plurality of openings, at least one draining region for draining the liquid after the flow, however no non-fluidic edges, limiters, or other mechanical guide means for guiding the flat object. A transport device based on the invention may preferably be utilized within and between treatment systems for flat objects or substrates. Simultaneously with the transport a preferably wet-chemical treatment may be carried out, if the transport liquid has respective properties, or comprises respective substances or agents.

公开(公告)号：EP2289097B1

公开(公告)日：2012-10-10

申请号：EP09765641.7

申请日：2009-06-19

申请人： RENA GmbH

发明人： POTOFEEW, Vitalij ,  BAREIS, Dirk ,  KALTENBACH, Konrad ,  DELAHAYE, Franck

IPC分类号： H01L21/677

CPC分类号： H01L21/67784