MOLDED POLISHING PAD HAVING INTEGRAL WINDOW
    1.
    发明公开
    MOLDED POLISHING PAD HAVING INTEGRAL WINDOW 审中-公开
    与整体成形WINDOW SHAPED抛光垫上,

    公开(公告)号:EP1210209A4

    公开(公告)日:2004-06-30

    申请号:EP00952699

    申请日:2000-08-10

    申请人: RODEL INC

    CPC分类号: B24B37/205 B24D3/28

    摘要: A polishing pad (10) is formed as a one-piece article having a region (12) which is transparent and an adjacent region (14) which is opaque. The article (10) is formed by solidifying a flowable polymeric material which at least initially has a uniform composition. The flowable polymeric material is processed during a molding operation to provide the transparent region (12) and the adjacent opaque region (14). Types of polymeric material suitable for making the polishing pad (10) include a single thermoplastic material, a blend of thermoplastic materials, and a reactive thermosetting polymer.