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公开(公告)号:EP1334501B1
公开(公告)日:2005-11-16
申请号:EP01989843.6
申请日:2001-10-25
申请人: RAYTHEON COMPANY
IPC分类号: H01H59/00
CPC分类号: H01H1/0036 , H01H1/06 , H01H1/20 , H01H1/32 , H01H1/66 , H01H9/40 , H01H2001/0078
摘要: A MEM relay device includes a flexible multi-point contact system with a self-aligning structure. The inventive relay includes a first signal contact electrically connected to a first set of flexible electrically conductive signal teeth and a second signal contact electrically connected to a second set of flexible electrically conductive signal teeth. An actuator, selectively moves a shorting contact between an open and closed position. In the closed position, two sets of flexible electrically conductive shorting teeth mesh with a first set of flexible electrically conductive signal teeth and the second set of flexible electrically conductive signal teeth creating a conductive path between the two signal contacts. The contact structure facilitates fabrication using a deep reactive ion etch (DRIE) process and brings signal and actuator contacts to an edge of each die.
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公开(公告)号:EP1334501A1
公开(公告)日:2003-08-13
申请号:EP01989843.6
申请日:2001-10-25
申请人: Raytheon Company
IPC分类号: H01H59/00
CPC分类号: H01H1/0036 , H01H1/06 , H01H1/20 , H01H1/32 , H01H1/66 , H01H9/40 , H01H2001/0078
摘要: A MEM relay device includes a flexible multi-point contact system with a self-aligning structure. The inventive relay includes a first signal contact electrically connected to a first set of flexible electrically conductive signal teeth and a second signal contact electrically connected to a second set of flexible electrically conductive signal teeth. An actuator, selectively moves a shorting contact between an open and closed position. In the closed position, two sets of flexible electrically conductive shorting teeth mesh with a first set of flexible electrically conductive signal teeth and the second set of flexible electrically conductive signal teeth creating a conductive path between the two signal contacts. The contact structure facilitates fabrication using a deep reactive ion etch (DRIE) process and brings signal and actuator contacts to an edge of each die.
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