MICRO-RELAY CONTACT STRUCTURE FOR RF APPLICATIONS
    1.
    发明授权
    MICRO-RELAY CONTACT STRUCTURE FOR RF APPLICATIONS 有权
    接触结构微型继电器,用于RF应用

    公开(公告)号:EP1334501B1

    公开(公告)日:2005-11-16

    申请号:EP01989843.6

    申请日:2001-10-25

    申请人: RAYTHEON COMPANY

    IPC分类号: H01H59/00

    摘要: A MEM relay device includes a flexible multi-point contact system with a self-aligning structure. The inventive relay includes a first signal contact electrically connected to a first set of flexible electrically conductive signal teeth and a second signal contact electrically connected to a second set of flexible electrically conductive signal teeth. An actuator, selectively moves a shorting contact between an open and closed position. In the closed position, two sets of flexible electrically conductive shorting teeth mesh with a first set of flexible electrically conductive signal teeth and the second set of flexible electrically conductive signal teeth creating a conductive path between the two signal contacts. The contact structure facilitates fabrication using a deep reactive ion etch (DRIE) process and brings signal and actuator contacts to an edge of each die.

    MICRO-RELAY CONTACT STRUCTURE FOR RF APPLICATIONS
    2.
    发明公开
    MICRO-RELAY CONTACT STRUCTURE FOR RF APPLICATIONS 有权
    接触结构微型继电器,用于RF应用

    公开(公告)号:EP1334501A1

    公开(公告)日:2003-08-13

    申请号:EP01989843.6

    申请日:2001-10-25

    申请人: Raytheon Company

    IPC分类号: H01H59/00

    摘要: A MEM relay device includes a flexible multi-point contact system with a self-aligning structure. The inventive relay includes a first signal contact electrically connected to a first set of flexible electrically conductive signal teeth and a second signal contact electrically connected to a second set of flexible electrically conductive signal teeth. An actuator, selectively moves a shorting contact between an open and closed position. In the closed position, two sets of flexible electrically conductive shorting teeth mesh with a first set of flexible electrically conductive signal teeth and the second set of flexible electrically conductive signal teeth creating a conductive path between the two signal contacts. The contact structure facilitates fabrication using a deep reactive ion etch (DRIE) process and brings signal and actuator contacts to an edge of each die.