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    Stress measurement method using x-ray diffraction analysis
    1.
    发明公开
    Stress measurement method using x-ray diffraction analysis 有权
    用于测量利用X射线衍射分析的机械应力的方法

    公开(公告)号：EP1394533A3

    公开(公告)日：2004-06-09

    申请号：EP03019383.3

    申请日：2003-08-27

    申请人： Rigaku Corporation

    发明人： Yokoyama, Ryouichi ,  Endo, Kamihisa

    IPC分类号： G01N23/20

    CPC分类号： G01N23/207 ,  H01L21/31691

    摘要： A stress of a c-axis-oriented specimen (10) of a tetragonal polycrystal is measured using X-ray diffraction under the assumption of a plane stress state. An X-ray optical system is set in the location of ϕ = 0°, 45° or 90°. An X-ray (16) diffracted at a crystal plane (the direction of the normal thereto is the direction of an angle of ψ) with the Miller indices (hk1) is detected. A diffraction angle θ in a strain state is measured in the vicinity of a Bragg's angle θ 0 in a non-strain state. Strains s with respect to a plurality of ψ are calculated from the difference between the measurement values θ and the Bragg's angle θ 0 . Specific stress calculation formulae are determined with respect to the tetragonal system having the Laue symmetry 4/mmm. The stress is calculated from the slope of the linear line of plotted measurement results.

    Diffraction condition simulation device, diffraction measurement system, and crystal analysis system
    3.
    发明公开
    Diffraction condition simulation device, diffraction measurement system, and crystal analysis system 有权
    衍射条件模拟装置，衍射测量系统和晶体分析系统

    公开(公告)号：EP0959345A3

    公开(公告)日：2001-10-17

    申请号：EP99303849.6

    申请日：1999-05-18

    申请人： Rigaku Corporation

    发明人： Yokoyama, Ryouichi ,  Endo, Kamihisa ,  Ozawa, Tetsuya ,  Harada, Jimpei

    IPC分类号： G01N23/20 ,  G06F17/00

    CPC分类号： G01N23/20

    摘要： A novel diffraction condition simulation device for calculating a reciprocal lattice to a crystal sample and displaying, on a computer screen, a Bragg reflection condition of X rays caused by the crystal sample, characterized in that a section where a plurality of reciprocal lattice points in a limiting sphere which rotates with rotation of a crystal intersect a diffraction plane is displayed with a section of the limiting sphere on the computer screen, is provided, thereby realizing quick and easy calculation and display of a desired Bragg reflection satisfying various diffraction conditions necessary for structure analysis and characterization of structure of a crystal, without any limitation as to diffraction conditions, diffraction information and the like.

    摘要翻译： 一种新颖的衍射条件模拟装置，用于计算晶体样品的倒易点阵，并在计算机屏幕上显示由该晶体样品引起的X射线的布拉格反射条件，其特征在于，一个区域中的多个倒易格点 通过在计算机屏幕上的限制球的截面显示随着晶体的旋转而旋转的极限球与衍射面相交的结构，从而实现满足结构所需的各种衍射条件的所需布拉格反射的快速且容易的计算和显示 分析和表征晶体的结构，对衍射条件，衍射信息等没有任何限制。

    Stress measurement method using x-ray diffraction analysis
    5.
    发明公开
    Stress measurement method using x-ray diffraction analysis 有权
    Verfahren zur Messung机械师Spannungen手套Röntgenbeugungsanalyse

    公开(公告)号：EP1394533A2

    公开(公告)日：2004-03-03

    申请号：EP03019383.3

    申请日：2003-08-27

    申请人： Rigaku Corporation

    发明人： Yokoyama, Ryouichi ,  Endo, Kamihisa

    IPC分类号： G01N23/20 ,  G01L1/25 ,  G01B15/06

    CPC分类号： G01N23/207 ,  H01L21/31691

    摘要： A stress of a c-axis-oriented specimen (10) of a tetragonal polycrystal is measured using X-ray diffraction under the assumption of a plane stress state. An X-ray optical system is set in the location of φ = 0°, 45° or 90°. An X-ray (16) diffracted at a crystal plane (the direction of the normal thereto is the direction of an angle of ψ) with the Miller indices (hk1) is detected. A diffraction angle θ in a strain state is measured in the vicinity of a Bragg's angle θ 0 in a non-strain state. Strains s with respect to a plurality of ψ are calculated from the difference between the measurement values θ and the Bragg's angle θ 0 . Specific stress calculation formulae are determined with respect to the tetragonal system having the Laue symmetry 4/mmm. The stress is calculated from the slope of the linear line of plotted measurement results.

    摘要翻译： 在假设平面应力状态下，使用X射线衍射测量四方晶体的c轴取向试样（10）的应力。 X射线光学系统设置在phi = 0°，45°或90°的位置。 检测在米勒指数（hk1）处在晶面（法线方向为角度方向）的衍射的X射线（16）。 衍射角＆thetas; 在非应变状态下在布拉格角度θ附近测量应变状态。 相对于多个psi的菌株根据测量值和差异之间的差计算; 和布拉格的角度和角度; 0。 相对于具有Laue对称性4 / mmm的四方系统确定比应力计算公式。 应力由绘制的测量结果的线性斜率计算。

    Diffraction condition simulation device, diffraction measurement system, and crystal analysis system
    6.
    发明公开
    Diffraction condition simulation device, diffraction measurement system, and crystal analysis system 有权
    Diffraktionsbedingungssimulationsvorrichtung，Diffraktionsmessvorrichtung和晶体分析系统

    公开(公告)号：EP0959345A2

    公开(公告)日：1999-11-24

    申请号：EP99303849.6

    申请日：1999-05-18

    申请人： Rigaku Corporation

    发明人： Yokoyama, Ryouichi ,  Endo, Kamihisa ,  Ozawa, Tetsuya ,  Harada, Jimpei

    IPC分类号： G01N23/20

    CPC分类号： G01N23/20

    摘要： A novel diffraction condition simulation device for calculating a reciprocal lattice to a crystal sample and displaying, on a computer screen, a Bragg reflection condition of X rays caused by the crystal sample, characterized in that a section where a plurality of reciprocal lattice points in a limiting sphere which rotates with rotation of a crystal intersect a diffraction plane is displayed with a section of the limiting sphere on the computer screen, is provided, thereby realizing quick and easy calculation and display of a desired Bragg reflection satisfying various diffraction conditions necessary for structure analysis and characterization of structure of a crystal, without any limitation as to diffraction conditions, diffraction information and the like.