公开(公告)号：EP4209780A1

公开(公告)日：2023-07-12

申请号：EP21863913.6

申请日：2021-06-09

申请人： Rigaku Corporation

发明人： KIKUTA, Shinya ,  DOI, Makoto

IPC分类号： G01N23/223 ,  G06N20/00

摘要： Provided are a total reflection X-ray fluorescence spectrometer and an estimation method which are capable of easily and quickly determining whether contamination exists on a substrate through use of a machine learning device. The total reflection X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum representing a relationship between intensities, and energies, of emitted fluorescent X-rays by irradiating a surface of a substrate with primary X-rays at a total reflection critical angle or less; and a learning unit which includes an estimation unit configured to generate estimation data on an element contained in contamination on the surface of the substrate in response to input of the spectrum, and for which learning by the estimation unit has been executed based on teacher data including the spectrum for learning and data on the element contained in the contamination on the surface of the substrate which has been used to acquire the spectrum for learning and the estimation data generated when the spectrum for learning is input to the estimation unit.

公开(公告)号：EP3550292A1

公开(公告)日：2019-10-09

申请号：EP17876115.1

申请日：2017-11-14

申请人： Rigaku Corporation

发明人： MURAKAMI, Satoshi ,  OMOTE, Kazuhiko ,  KIKUTA, Shinya ,  IKESHITA, Akihiro

IPC分类号： G01N23/20

摘要： The X-ray reflectometer of the present invention includes: an irradiation angle variable unit (10) configured to vary an irradiation angle of a focused X-ray beam (6) with a sample surface (8a); a position sensitive detector (14) which is fixed; and a reflection intensity calculation unit (15) configured to, per reflection angle of reflected X-rays (13) constituting a reflected X-ray beam (12), integrate a detected intensity by a corresponding detection element (11), for only the detection elements (11) positioned within a divergence angle width of the reflected X-ray beam (12) in the position sensitive detector (14), in synchronization of variation in the irradiation angle (θ) of the focused X-ray beam (6) by the irradiation angle variable unit (10).