摘要:
The invention relates to a magnetic yoke (10) having a magnet (12) comprising a magnetizing device (14), on which a first yoke arm (18a) and a second yoke arm (18b) are disposed such that the magnet (12) and the two yoke arms (18a,18b) span a yoke intermediate space (20) extending from a front to a rear of the magnetic yoke; and a first pole shoe (22a) disposed on the first yoke arm (18a), and a second pole shoe (22b) disposed on the second yoke arm (18b), between which a yoke gap (24) is present; wherein the first pole shoe (22a) has a first width (b1) at a first end (40a) on the front of the magnetic yoke (10) parallel to the magnetizing device (14) of the magnet (12), and second width (b2), which is different from the first width (b1), at a second end (42a) positioned opposite of the first end (40a) at the rear of the magnetic yoke (10) parallel to the magnetizing device (14) of the magnet (12).
摘要:
The invention relates to a micromechanical component, comprising a light window (12); a mirror element (10), which can be adjusted with respect to the light window (12) about at least one axis of rotation (14, 16) from of a first position into at least a second position; an optical sensor (34a, 34b) having a detection surface, which is designed to determine a light intensity on the detection surface and to provide a corresponding sensor signal (A, B), wherein the light window (12), the mirror element (10) in the first position and the detection surface are arranged in relation to one another such that a portion (32) of a light beam (30), which is reflected on the light window (12) and deflected by the mirror element (10) onto the light window (12), strikes the detection surface at least partially; and comprising an evaluation unit, which is designed to define, on the basis of the sensor signal (A, B), information with respect to a current position of the mirror element (10) relative to the light window (12) and/or with respect to a current intensity of the deflected light beam (30). In addition, the invention relates to a method for operating a micromechanical component.
摘要:
The invention relates to a method for operating an electrostatic drive having a stator electrode (50) and an actuator electrode (52), which are designed as multilayer electrodes, wherein the actuator electrode (52) in the de-energized starting position, without a voltage applied between a stator electrode subunit (50b, 50c) and an actuator electrode subunit (52b, 52c), is arranged with respect to the stator electrode (50) such that the first actuator electrode subunit (52b) has a smaller distance from the first stator electrode subunit (50b) than the second actuator electrode subunit (52c), comprising the steps of: predeflecting the actuator electrode (52) with respect to the stator electrode (50) out of the de-energized starting position and into a first end position by applying a first potential ( π 1) to the first stator electrode subunit (50b) and applying a second potential ( π 2) deviating from the first potential ( π 1) to the first actuator electrode subunit (52b); and applying a third potential ( π 3) to the second stator electrode subunit (50c) and to the second actuator electrode subunit (52c), which deviates from the first potential ( π 1) and the second potential ( π 2).