Copper electropating bath and method
    2.
    发明公开
    Copper electropating bath and method 有权
    铜电镀浴和方法

    公开(公告)号:EP2366692A3

    公开(公告)日:2011-11-02

    申请号:EP11158231.8

    申请日:2011-03-15

    CPC分类号: C07D233/60 C25D3/38

    摘要: Copper plating baths containing a leveling agent that is a reaction product of a certain imidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.

    摘要翻译: 提供了含有流平剂的镀铜浴,所述流平剂是某种咪唑与某种在导电层表面上沉积铜的含环氧化合物的化合物的反应产物。 这种电镀浴在一定范围的电解质浓度下在基底表面上沉积大致平面的铜层。 还公开了使用这种镀铜浴沉积铜层的方法。

    Copper electropating bath and method
    7.
    发明公开
    Copper electropating bath and method 有权
    Kupfer-Elektroplattierbad und -verfahren

    公开(公告)号:EP2366692A2

    公开(公告)日:2011-09-21

    申请号:EP11158231.8

    申请日:2011-03-15

    CPC分类号: C07D233/60 C25D3/38

    摘要: Copper plating baths containing a leveling agent that is a reaction product of a certain imidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.

    摘要翻译: 提供含有作为特定咪唑与某种含氧化物的化合物在导电层表面上沉积铜的反应产物的流平剂的镀铜浴。 这种电镀浴在电解质浓度的范围内沉积在基底表面上基本平坦的铜层。 还公开了使用这种镀铜浴沉积铜层的方法。