公开(公告)号：EP2840599A1

公开(公告)日：2015-02-25

申请号：EP13778995.4

申请日：2013-04-10

申请人： Rorze Corporation

发明人： SAKIYA, Fumio ,  SAKATA, Katsunori

IPC分类号： H01L21/673

CPC分类号： H01L21/67742 ,  B25J11/0095 ,  E05F15/47 ,  E05F15/50 ,  E05F15/603 ,  E05F15/78 ,  H01L21/67265 ,  H01L21/67346 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67393 ,  H01L21/67748 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775

摘要： Provided is a wafer stocker that can prevent the inflow of an external atmosphere, maintain a wafer storage space at a desired atmosphere with a relatively small amount of gas, and prevent dust from being attached to a wafer surface. A shutter portion, including multiple shield plates having the same height as an interval between shelf plates disposed in a storage container, is disposed with a slight space from a body portion, and by supplying clean gas into the storage container, a clean atmosphere of a higher pressure than an external environment is maintained, and a shutter portion is opened and closed by moving up and down the shield plate independently from the shelf plate that supports a wafer.

摘要翻译： 本发明提供一种晶圆储料器也可以防止外部空气的流入而，保持在期望的气氛中在晶片的存储空间与气体的相对小的量，并且防止灰尘附着到晶片表面。 快门部分，包括具有相同的高度，在储存容器处理完毕搁板之间的间隔的多个屏蔽板，设置有从主体部分的轻微的空间，并通过提供清洁气体至储存容器，的清洁气氛 比外部环境更高的压力被保持，并且一个活门部分被打开和关闭通过上下移动从搁板屏蔽板unabhängig支撑晶片一样。

公开(公告)号：EP3796368A1

公开(公告)日：2021-03-24

申请号：EP18926100.1

申请日：2018-08-29

申请人： Rorze Corporation

发明人： SAKATA, Katsunori ,  SATO, Yasuhisa ,  OKUTSU, Hidekazu ,  HIROTA, Kenji

IPC分类号： H01L21/677

摘要： The purpose of the present invention is to provided, at low cost, a transport apparatus 2 which is capable of transporting a semiconductor wafer W between a FOUP 19 and a processing apparatus 3 without exposing a surface to be processed of the semiconductor wafer to an oxidizing atmosphere. This transport apparatus 2 includes a load port 20 that has atmosphere replacing function, a transport robot 2 that has an atmosphere replacing function, an aligner 40 that has an atmosphere replacing function, and a load loch chamber 12 that has an atmosphere replacing function. The surface being processed of the semiconductor wafer has the atmosphere replaced locally while the semiconductor wafer is being moved and is being subjected to processes such as positioning.

公开(公告)号：EP3734651A1

公开(公告)日：2020-11-04

申请号：EP19750264.4

申请日：2019-01-17

申请人： Rorze Corporation

发明人： SAKATA, Katsunori ,  SATO, Yasuhisa

IPC分类号： H01L21/677 ,  B25J15/08 ,  B65G49/07

摘要： Provided is a holding device 45 capable of holding securely and transporting a thin plate-shaped substrate for which surface processing has been completed without causing a natural oxide film to form on the surface to be processed thereof. This holding device 45 comprises a holding member 47 for holding the thin plate-shaped substrate, a purge plate 46 having formed therein a flow path 52 for the purpose of flowing therethrough an inert gas, and a piping member for connecting an inert gas supply source to the flow path 52. The purge plate 46 is equipped with discharged ports 51, which communicate with the flow path 52 and are provided on a surface facing the surface to be processed of the thin plate-shaped substrate held by the loading member 47, for the purpose of discharging the inert gas onto the processing surface of the thin plate-shaped substrate. In addition, the holding device 45 is equipped with a raising and lowering mechanism 48 that cause the holding member 47 and the purge plate 46 to be raised and lowered relative to each other.

公开(公告)号：EP3696847A1

公开(公告)日：2020-08-19

申请号：EP18865737.3

申请日：2018-09-28

申请人： Rorze Corporation

发明人： SAKATA, Katsunori

IPC分类号： H01L21/677 ,  H01L21/673

摘要： To provide an inexpensive pod opener opening a container and allowing cassettes stacked in the container to be accessible by a finger of a transportation robot. The pod opener of the invention includes an elevating mechanism elevating the cassette in a vertical direction, a first hook member engaging with an engagement means of the cassette and supporting the cassette, a second hook member supported by the first hook member, a forward and backward movement mechanism moving the first hook member and the second hook member forward and backward with respect to the cassette, an urging member urging the second hook member upward, and an atmosphere maintaining device maintaining an internal space having the cassette disposed therein in a predetermined atmosphere and the second hook member is displaceable with respect to the first hook member.