TRANSFER OF A THIN LAYER FROM A WAFER COMPRISING A BUFFER LAYER
    2.
    发明公开
    TRANSFER OF A THIN LAYER FROM A WAFER COMPRISING A BUFFER LAYER 有权
    薄膜从晶圆传送使用的缓冲层

    公开(公告)号:EP1535326A2

    公开(公告)日:2005-06-01

    申请号:EP03762848.4

    申请日:2003-07-09

    IPC分类号: H01L21/762

    CPC分类号: H01L21/76259 H01L21/76254

    摘要: Method of producing a structure comprising a thin layer of semiconductor material obtained from a wafer (10), the wafer (10) comprising a lattice parameter matching layer (2) comprising an upper layer of semiconductor material having a first lattice parameter, a film (3) of semiconductor material having a nominal lattice parameter substantially different from the first lattice parameter, said grown film (3) being strained by the matching layer (2), a relaxed layer (4) a nominal lattice parameter to substantially identical to the first lattice parameter, the method comprising transfer of the relaxed layer (4) and the strained film (3) to a receiving substrate (5) and enrichment in an element other than silicon of the relaxed layer (4), thus increasing the relaxed layer (4) lattice parameter.