公开(公告)号：EP0729640A4

公开(公告)日：1997-07-16

申请号：EP95901916

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

CPC classification number: C08J7/123 ,  B29C59/16 ,  B29C2035/0872 ,  C23C8/36 ,  C23C14/48 ,  H01J27/14 ,  H01J2237/08 ,  H01J2237/31701

Abstract: A method and apparatus for treating material surfaces (13) using a repetitively pulsed ion beam (11). In particular, the treatment is tailored by adjusting treatment parameters of a pulsed ion beam (11) to a duration less than or equal to 1000 ns and a repetition rate of less than 1 Hz.