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    Multiple-detector system for detecting charged particles
    2.
    发明公开
    Multiple-detector system for detecting charged particles 失效
    Mehrdetektorsystemfürdie Detektion geladener Partikel。

    公开(公告)号：EP0611169A1

    公开(公告)日：1994-08-17

    申请号：EP94301048.8

    申请日：1994-02-14

    Applicant: FISONS plc

    Inventor： Freedman, Philip Antony ,  Hall, Edward Francis Henry

    IPC: H01J49/02 ,  H01J3/04 ,  H01J43/04

    CPC classification number: H01J43/045 ,  H01J49/025

    Abstract: A multiple charged-particle detector system includes a plurality of charged-particle detector assemblies (10-12) which are each made up of a first arm (19-22) and a second arm (24-27) extending at an angle to each other. Charged particles (4-7) enter an aperture (14-18) at the entrance of the first arm (19-22) of each detector assembly (10-12) and strike a dynode (30-33) positioned at the intersection of the two arms causing electrons to be emitted by the dynode (30-33). Some of the electrons pass into the second arms (24-27) of the detector assemblies (10-12) and are detected by a continuous-dynode electron multiplier (35-38). The first arms (19-22) are narrower than the detectors (35-38), and the detector assemblies (10-12) are arranged in such a way that the minimum separation at which charged-particle beams (4-7) can be detected is determined by the widths of the said first arms (19-22) of the detector assemblies (10-12), and not by the widths of the detectors (35-38) themselves.

    Abstract translation: 多个带电粒子检测器系统包括多个带电粒子检测器组件（10-12），每个带电粒子检测器组件由第一臂（19-22）和第二臂（24-27）构成，第一臂（19-22）和第二臂 其他。 带电粒子（4-7）在每个检测器组件（10-12）的第一臂（19-22）的入口处进入孔（14-18），并且撞击位于相交处的倍增极（30-33） 两臂引起电子由倍增极发射（30-33）。 一些电子进入检测器组件（10-12）的第二臂（24-27），并由连续的倍增电极倍增器（35-38）检测。 第一臂（19-22）比检测器（35-38）窄，并且检测器组件（10-12）以使得带电粒子束（4-7）的最小间隔可以 被检测由检测器组件（10-12）的所述第一臂（19-22）的宽度确定，而不是由检测器（35-38）本身的宽度确定。

    Apparatus for ion implantation
    7.
    发明公开
    Apparatus for ion implantation 失效
    离子注入装置

    公开(公告)号：EP0145120A1

    公开(公告)日：1985-06-19

    申请号：EP84305547.6

    申请日：1984-08-15

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Aitken, Derek

    IPC: H01J37/08 ,  H01J3/04

    CPC classification number: H01J49/30 ,  H01J27/022 ,  H01J27/028 ,  H01J27/14 ,  H01J37/05 ,  H01J37/08 ,  H01J37/3171

    Abstract: The disclosure relates to a system for implanting ions into a target element including a source arrangement (230) for producing an ion beam; a beam analyzing arrangent for receiving the ion beam and selectively separating various ion species in the beam on the basis of mass to produce an analyzed beam; and a beam resolving arrangent disposed in the path of the analyzed beam for permitting a preselected ion species to pass to the target element. The ion source arrangement (230) comprises an arc chamber (230C) having an elongate exit aperture (232), and an elongate filament-cathode (230D). Bias and operating potentials are provided for the source arrangement and gaseous material to be ionized is supplied to the chamber. The ion source (230) utilises an electromagnet arrangement (280) having poles (281) aligned with the source filament (230D) for causing the electrons emitted by the filament to spiral around and create ions of the gaseous material supplied to the chamber (230C) and to compensate for non-uniformity in the ion beam emitted along the chamber, current to the field coils of the magnet for each pole is controlled independently.

    Abstract translation: 本公开涉及一种用于将离子注入到目标元件中的系统，该系统包括用于产生离子束的源装置（230） 光束分析装置，用于接收离子束并基于质量选择性地分离光束中的各种离子种类以产生分析光束; 以及布置在分析光束的路径中的光束分辨布置，用于允许预选择的离子物质传递到目标元件。 离子源装置（230）包括具有细长出口孔（232）的电弧室（230C）和细长灯丝 - 阴极（230D）。 为源设置提供偏置和操作电位，并且将要离子化的气态材料提供给室。 离子源（230）利用具有与源丝（230D）对准的极（281）的电磁体布置（280），用于使得由丝发射的电子旋转并产生供应到腔室（230C）的气态材料的离子 ）并且补偿沿腔室发射的离子束中的不均匀性，独立地控制到每个磁极的磁体的励磁线圈的电流。

    High speed pulse train generator
    10.
    发明公开
    High speed pulse train generator 失效
    快速脉冲串发生器。

    公开(公告)号：EP0139387A1

    公开(公告)日：1985-05-02

    申请号：EP84305650.8

    申请日：1984-08-20

    Applicant: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY

    Inventor： Shaw, Herbert John ,  Newton, Steven A.

    IPC: G02B6/28 ,  H01J3/04 ,  H03K3/86

    CPC classification number: G02B6/264 ,  G02B6/2861 ,  H03K3/86 ,  Y10S359/90

    Abstract: There is disclosed a high speed pulse train generator for generating a train of pulses having arbitrarily close spacing. The apparatus in one form consists of a generator loop (82), comprising a fiber optic waveguide looped through a directional coupler (86), with the output fiber (76) serving as the input fiber for a similarly structured multiplexer loop (84). The lengths of the two loops (82, 84) are adjusted such that the time difference (τ) in the propagation times of light around the respective loops (82, 84) is small compared to the time of propagation around either loop (T, T- T ). The times are adjusted to obtain any arbitrary spacing of the pulses in the output pulse train (A. B. C, D, E) which comprises interleaved pulse trains resulting from each pulse input (92, 100) to the multiplexer loop (84).
    Also disclosed is a single loop embodiment for bidirectional data rate transformation and methods of using all the embodiments.

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