摘要:
First, a stationary electrode layer is formed over a semiconductor substrate and an integrated network is composed in a circuit element area around the stationary electrode layer by electrode wiring forming each circuit element. A spacer is arranged on a passivation film in plural places. A dummy island is formed in an area between the circuit element area and the stationary electrode layer area. Supply potential Vcc is applied to the dummy island and ground potential GND is applied to a P + -type separated area.
摘要:
A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.
摘要:
First, a stationary electrode layer is formed over a semiconductor substrate and an integrated network is composed in a circuit element area around the stationary electrode layer by electrode wiring forming each circuit element. A spacer is arranged on a passivation film in plural places. A dummy island is formed in an area between the circuit element area and the stationary electrode layer area. Supply potential Vcc is applied to the dummy island and ground potential GND is applied to a P + -type separated area.
摘要:
A fixed electrode layer 12 is formed on a semiconductor substrate 11. A vibrating film is formed on the fixed electrode layer through a spacer 14. Since the vibrating film is a light-permeable film, in order to prevent the malfunction of an electronic circuit formed in the semiconductor substrate by incident light, the region where the electronic circuit is to be formed is covered with a shield metal 33.
摘要:
A fixed electrode layer 12 is formed on a semiconductor substrate 11. A vibrating film is formed on the fixed electrode layer through a spacer 14. Since the vibrating film is a light-permeable film, in order to prevent the malfunction of an electronic circuit formed in the semiconductor substrate by incident light, the region where the electronic circuit is to be formed is covered with a shield metal 33.
摘要:
A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.
摘要:
A n electret film (26) is formed on the rear side of a front face plate (11a) of a cylindrical capsule (11) made of aluminium. Closely in opposition thereto, an electrically conductive diaphragm (29) is held by an electrically conductive holding member (32) itself and disposed. By means of a wiring board (24) provided behind the holding member, the rear end of the capsule is closed. The rear end of the capsule is bent on the rear periphery of the wiring board, and calked thereat. In the capsule, an impedance conversion IC device (21) is connected to the electrically conductive holding member and the wiring board.
摘要:
A vibration membrane is formed by a laminate consisting of a piezoelectric film on both surfaces of which electrode coats are formed respectively and a soft sheet on both surfaces of which metal coats are formed respectively, and a weight is mounted on one of the surfaces of the vibration membrane. A pair of frame-like elements is provided to support the peripheral portion of the vibration membrane on each side by one frame-like element. The peripheral portion of the vibration membrane is supported by the pair of frame-like elements by accommodating the vibration membrane and the frame-like elements in a casing one end of which is open and closing the open end of the casing by a board.
摘要:
A vibration membrane is formed by a laminate consisting of a piezoelectric film on both surfaces of which electrode coats are formed respectively and a soft sheet on both surfaces of which metal coats are formed respectively, and a weight is mounted on one of the surfaces of the vibration membrane. A pair of frame-like elements is provided to support the peripheral portion of the vibration membrane on each side by one frame-like element. The peripheral portion of the vibration membrane is supported by the pair of frame-like elements by accommodating the vibration membrane and the frame-like elements in a casing one end of which is open and closing the open end of the casing by a board.