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公开(公告)号：EP3203217A4
公开(公告)日：2018-05-09
申请号：EP15847927
申请日：2015-04-28
发明人： NAGATA YASUSHI , SASA YASUSHI
IPC分类号： G01N21/88 , G01N21/956 , G06T7/00
CPC分类号： G01N21/8851 , G01N21/88 , G01N21/956 , G01N21/95607 , G01N21/95684 , G01N2021/8864 , G01N2021/8887 , G06T7/0002 , G06T7/001
摘要： In a first defect candidate area detected on the basis of a difference between a value of each pixel in a picked-up image and a value of a corresponding pixel in a reference image and a second defect candidate area detected on the basis of a ratio between a value of each pixel in the picked-up image and a value of a corresponding pixel in the reference image, an overlapping area is detected as a defect area. It is thereby possible to suppress detection of a false defect and detect a defect with high accuracy. In a preferable defect detection part (62), a shaking comparison part (623) detects a defect candidate area on the basis of a difference in the pixel value between the picked-up image and the reference image, and a false information reducing part (629) limits pixels to be used for obtaining the above ratio to those included in the defect candidate area. It is thereby possible to detect a defect with high efficiency.
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公开(公告)号：EP3190401A4
公开(公告)日：2018-05-09
申请号：EP15838785
申请日：2015-04-28
发明人： NAGATA YASUSHI
IPC分类号： G01N21/88 , G01N21/95 , G01N21/956 , G06T7/00
CPC分类号： G01N21/95 , G01N21/88 , G01N21/8806 , G01N21/8851 , G01N21/95607 , G01N21/95684 , G01N2021/8816 , G01N2021/8867 , G01N2201/062 , G06T7/001 , G06T2207/10152
摘要： In an inspection apparatus, a plurality of light source parts (42, 43) for irradiating an object area on a surface of an object (9) with light from a plurality of directions, respectively, are provided, and a first picked-up image representing an object area is acquired in one image pickup part (32, 33) by light irradiation from one of the plurality of light source parts and a second picked-up image is acquired in the image pickup part by light irradiation from the plurality of light source parts. Further, a first defect candidate area is detected by comparing the first picked-up image with a first reference image corresponding to the first picked-up image and a second defect candidate area is detected by comparing the second picked-up image with a second reference image corresponding to the second picked-up image. Then, an overlapping area in the first defect candidate area and the second defect candidate area is specified as a defect area in the object area. It is thereby possible to detect a defect on the satin-finished surface of the object with high accuracy.
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