PINHOLE OR HOLE DETECTION DEVICE AND METHOD
    1.
    发明公开

    公开(公告)号:EP3396361A1

    公开(公告)日:2018-10-31

    申请号:EP16879281.0

    申请日:2016-12-19

    申请人: POSCO

    发明人: BAE, Ho-Moon

    IPC分类号: G01N21/89 G01N21/894

    摘要: According to one embodiment of the present invention, a detection device and a detection method for detecting a hole or a pinhole present in a material are provided. The detection device according to one embodiment of the present invention comprises: an illumination unit for emitting light at one side of the material; a light receiving unit for acquiring an image of the material at another side of the material so as to output a detection signal; a detection unit for determining whether a hole or a pinhole is present in the material by using the detection signal; and an illumination control unit for dividing the illumination unit into a plurality of regions, and controlling the illumination unit such that light having different intensities of illumination for each region is emitted.

    RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR
    4.
    发明公开
    RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR 审中-公开
    RINGLICHTBELEUCHTER UND STRAHLENFORMERFÜRDEN RINGLICHTBELEUCHTER

    公开(公告)号:EP2564111A2

    公开(公告)日:2013-03-06

    申请号:EP11774522.4

    申请日:2011-04-28

    发明人: HILL, Andy

    摘要: A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a beam shaper comprising a light collector, a homogenizing means for light from the light source, and an imaging means for imaging an output of the homogenizing means into an area to be illuminated. The homogenizing means in embodiments is a rod, into which light from the light collector is directed. The end of the rod opposite the light collector is imaged by the imaging means into the area to be illuminated.

    摘要翻译: 公开了一种具有环形布置的光源的环形照明器。 对于每个光源,对应于包括光收集器的光束整形器,用于来自光源的光的均匀化装置,以及用于将均化装置的输出成像到要照明的区域中的成像装置。 实施例中的均质装置是一个杆,来自光收集器的光被引向该杆。 与光收集器相对的杆的端部通过成像装置成像到要照明的区域中。

    IMPURITY MEASURING METHOD AND DEVICE
    5.
    发明公开
    IMPURITY MEASURING METHOD AND DEVICE 审中-公开
    方法和设备,用于测量污染

    公开(公告)号:EP1637868A4

    公开(公告)日:2008-02-13

    申请号:EP04745872

    申请日:2004-06-14

    IPC分类号: G01N21/88 G01N33/20

    摘要: An impurity measuring device comprises a table (T) on which a sample (S) is placed with its fracture surface (h) upward, an illuminating means (7) for irradiating the fracture surface (h) with light (L) from a plurality of directions, an imaging means (10) for imaging the fracture surface (h) illuminated by the light (L), a dark and light coloring means for subjecting the imaged image to dark and light coloring, and a binarizing means for binarizing the image through comparison between the result of the dark and light coloring and a threshold value. Irradiating the fracture surface (h) with the light (L) from a plurality of directions ensures that the image obtained by imaging the fracture surface (h) is free from shading or optical irregularities due to minute irregularities in the fracture surface (h). Therefore, impurities in the sample (S) from the fracture surface (h) can be accurately detected by subjecting the image to dark and light coloring and binarization.

    IMPURITY MEASURING METHOD AND DEVICE
    6.
    发明公开
    IMPURITY MEASURING METHOD AND DEVICE 审中-公开
    VERFAHREN UND VORRICHTUNG ZUR MESSUNG VON VERUNREINIGUNGEN

    公开(公告)号:EP1637868A1

    公开(公告)日:2006-03-22

    申请号:EP04745872.4

    申请日:2004-06-14

    IPC分类号: G01N21/17 G01N33/20

    摘要: An impurity measuring device includes a table (T) on which a sample (S) is to be placed with its fracture surface (h) facing up, an illuminating means (7) for irradiating the fracture surface (h) with light (L) from a plurality of directions, an image sensing means for sensing an image of the fracture surface (h) irradiated with the light (L), continuous tone color image processing means for processing the sensed image into a continuous tone color image, and a binarizing means for binarizing the continuous tone color image through comparison between the result of the continuous tone color image processing and a threshold value. As the fracture surface (h) is irradiated with the light (L) from the plurality of directions, the image obtained by sensing the image of the fracture surface (h) is free from shading or optical irregularities caused by minute irregularities on the fracture surface (h). Therefore, impurities in the sample (S) can be accurately detected from the fracture surface (h) by subjecting the image to the continuous tone color image processing and binarization.

    摘要翻译: 一种杂质测量装置,包括:台面(T),将其断面(h)面向上放置样品(S);用于用光(L)照射断裂面(h)的照明装置(7) 从多个方向观察用于感测用光(L)照射的断裂面(h)的图像的图像感测装置,用于将感测图像处理成连续色彩图像的连续色调图像处理装置,以及二值化 用于通过连续色彩彩色图像处理的结果与阈值之间的比较二值化连续色调彩色图像的装置。 由于从多个方向对光(L)照射断裂面(h),通过感测断裂面(h)的图像而获得的图像没有由断裂面上的微细凹凸引起的遮光或光学不规则 (H)。 因此,通过对图像进行连续色调图像处理和二值化处理,可以从断裂面(h)精确地检测样品(S)中的杂质。

    MINIATURIZED IMAGING APPARATUS FOR WAFER EDGE
    8.
    发明公开
    MINIATURIZED IMAGING APPARATUS FOR WAFER EDGE 审中-公开
    MINIATURISIERTE ABBILDUNGSVORRICHTUNGFÜRWAFERKANTE

    公开(公告)号:EP3111469A1

    公开(公告)日:2017-01-04

    申请号:EP15805729.9

    申请日:2015-06-09

    发明人: HORN, Paul

    IPC分类号: H01L21/66

    摘要: Disclosed are methods and apparatus for imaging a rounded edge of a sample, such as a wafer with a beveled edge. In one embodiment, the system includes a curved diffuser having an internal surface for positioning towards the rounded edge of the sample and an external surface opposite the internal surface and light sources for generating a plurality of illumination beams adjacent to a plurality of positions on the external surface of the diffuser so that the diffuser outputs uniform light onto the rounded edge of the sample at a wide range of incident angles. The system further includes a sensor for receiving light scattered from the rounded edge of the sample in response to the incident light and generating a detected signal for generating an image. These elements are partially or entirely integrated into a compact assembly.

    摘要翻译: 公开了用于成像样品的圆形边缘的方法和装置,例如具有斜边的晶片。 在一个实施例中,系统包括弯曲扩散器,其具有用于朝向样品的圆形边缘定位的内表面和与内表面相对的外表面和光源,用于产生与外部多个位置相邻的多个照明光束 扩散器的表面,使得漫射器在宽的入射角范围内将均匀的光输出到样品的圆形边缘上。 该系统还包括传感器,用于响应于入射光接收从样品的圆形边缘散射的光,并产生用于产生图像的检测信号。 这些元件部分或完全集成到紧凑的组件中。

    DETECTION OF SPURIOUS INFORMATION OR DEFECTS ON PLAYING CARD BACKS
    9.
    发明公开
    DETECTION OF SPURIOUS INFORMATION OR DEFECTS ON PLAYING CARD BACKS 审中-公开
    ERKENNUNG VONSTÖRINFORMATIONENODER DEFEKTEN AUF DERRÜCKSEITEVON SPIELKARTEN

    公开(公告)号:EP2999526A1

    公开(公告)日:2016-03-30

    申请号:EP14800369.2

    申请日:2014-05-21

    申请人: Blazevic, Mladen

    发明人: Blazevic, Mladen

    摘要: Methods and systems detect markings or flaws on the backs of playing cards. The method includes: providing ambient radiation at a gaming table and reflecting some of that radiation off a back surface of a playing card; capturing reflected radiation with a radiation sensor; the radiation sensor transmitting signals based on the reflected radiation captured by the radiation sensor; the transmitted signals providing data that contains image data of the back of the playing card; and displaying an image of the back of the playing card based on the image data. The transmitted signals provide image data of the back of the playing card and are also received by a processor that evaluates or compares that data. The system may be an installed casino system (with eye-in-the-sky technology), a portable box, or a component within a shuffling device or dealer shoe.

    摘要翻译: 方法和系统检测纸牌背面的标记或缺陷。 该方法包括:在游戏桌上提供环境辐射,并将该辐射中的一些从背面的背面反射出来; 用辐射传感器捕获反射辐射; 所述辐射传感器基于由所述辐射传感器捕获的反射辐射来发射信号; 发送信号提供包含纸牌背面的图像数据的数据; 以及基于图像数据显示纸牌背面的图像。 所发送的信号提供纸牌背面的图像数据,并且还由评估或比较该数据的处理器接收。 该系统可以是安装的娱乐系统(具有眼睛的天空技术),便携式盒子或洗牌装置或经销商鞋中的部件。