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1.发明公开Optical waveguide probe and its manufacturing method 有权Optische Wellenleitersonde und deren Herstellungsverfahren。
公开(公告)号：EP1705475A2
公开(公告)日：2006-09-27
申请号：EP06013102.6
申请日：1998-12-15
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.
This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.摘要翻译： 本发明的目的是获得一种形成为钩形的光波导探针，以通过使用硅工艺的制造来照亮和检测光。 该光波导探针形成为钩形，并由在探针针5上被锐化并由电介质构成的光波导1和支撑该光波导1的基板2构成。该光波导1形成在基板2的上方。 光波导1由芯8构成，以透射光和比芯8更小的折射率的包层9。
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公开(公告)号：EP1705475B1
公开(公告)日：2012-08-15
申请号：EP06013102.6
申请日：1998-12-15
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公开(公告)号：EP1705475A3
公开(公告)日：2007-05-02
申请号：EP06013102.6
申请日：1998-12-15
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.
This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.-
4.发明授权OPTICAL MICRO CANTILEVER, METHOD OF MANUFACTURE THEREOF, AND MICRO CANTILEVER HOLDER 有权光学微BOOM，方法本身和MICRO BOOM HOLDER
公开(公告)号：EP1089066B1
公开(公告)日：2008-09-03
申请号：EP00906740.6
申请日：2000-03-06
发明人： Niwa, Takashi , Kato, Kenji , Ichihara, Susumu , Chiba, Norio , Mitsuoka, Yasuyuki , Oumi, Manabu , Kasama, Nobuyuki
摘要： A low-loss optical micro cantilever (10) comprises a support (1), an optical waveguide (2), an opaque film (3), a reflective film (4), a chip (5) with a pointed end, a minute opening (6) in the pointed of the chip (5), and a reflective mirror (7) for directing the light (H) from an optical input/output end (8) of the optical waveguide (2) toward the minute opening (6).
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5.发明公开SOM cantilever with hole with tip filling with a projected shape 有权Auslegerfüroptisches Nahfeld-Rastermikroskop
公开(公告)号：EP1531327A1
公开(公告)日：2005-05-18
申请号：EP05003634.2
申请日：1999-11-02
发明人： Niwa, Takashi , Ichihara, Susumu , Mitsuoka, Yasuyuki , Kato, Kenji , Chiba, Norio , Oumi, Manabu , Kasama, Nobuyuki
摘要： There is provided an optical cantilever which is an optical cantilever for SNOM for irradiating and / or detecting light to or from a very small aperture, and is excellent in mass production performance and uniformity and capable of observing even a soft sample at high speed without damaging the sample.
There is provided an optical cantilever characterized in including a base portion 1, a cantilever portion 2 extended from the base portion 1, a light propagating portion 5 of a dielectric member penetrating the cantilever portion 2, formed to project above the cantilever on a side opposed to the base portion and having a sharpened front end and a light propagating tip 3, a light shielding film 6 covering a surrounding of the sharpened dielectric member and a very small aperture 4 formed at the sharpened front end of the dielectric member.摘要翻译： 提供了一种光学悬臂，其是用于向非常小的孔径照射和/或检测光的SNOM的光学悬臂，并且具有优异的批量生产性能和均匀性，并且甚至可以高速地观察软样品而不损坏 例子。 提供了一种光学悬臂，其特征在于包括基部1，从基部1延伸的悬臂部分2，穿透悬臂部分2的电介质构件的光传播部分5，形成为突出在悬臂上方 在与基部相对的一侧上具有锋利的前端和光传播尖端3，覆盖锐化的电介质构件的周围的遮光膜6和形成在电介质构件的尖锐前端的非常小的孔4 。
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公开(公告)号：EP1271497A3
公开(公告)日：2004-08-04
申请号：EP02254357.3
申请日：2002-06-21
发明人： Shinohara, Yoko , Oumi, Manabu , Noboyuki, Kasama , Maeda, Hidetaka , Kato, Kenji , Ichihara, Susumu , Niwa, Takashi , Ohkubo, Toshifumi , Hosaka, Hiroshi , MITSUOKA, Yasayuki , HIROTA, Terunao , ITAO, Kiyoshi
CPC分类号： B82Y10/00 , G11B7/122 , G11B7/124 , G11B7/1387 , G11B7/22
摘要： It is an optical information recording and reading apparatus for recording and/or reading information at a high density by using a near-field light-generating device as a near-field optical head. The end surface of the core 201 of a flexible optical waveguide 103 is formed in an intermediate position in the optical waveguide 103 and in a portion fixed to the near-field optical head 104. Light for recording and reading information is spread within the clad 202. The spread light flux is reflected toward the near-field optical head 104 by a reflective surface 203 formed on the side of one end of the optical waveguide 103. The reflected light flux is collected by light-collecting structures and then is made to enter an optical minute aperture 206 formed in the near-field optical head 104. Near-field light is created near the minute aperture 206. Light scattered by the surface of the recording medium 105 is received. Thus, information on the recording medium 105 can be recorded and read.
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7.发明公开Method for forming aperture, near field optical head and method for fabricating the same and information recording/reading apparatus 有权一种生产用于记录的孔，场光学头和制造的方法，装置和再现信息的方法
公开(公告)号：EP1162605A3
公开(公告)日：2003-04-02
申请号：EP01304917.6
申请日：2001-06-05
发明人： Niwa, Takashi , Kato, Kenji , Mitsuoka, Yasuyuki , Oumi, Manabu , Ichihara, Susumu , Maeda, Hidetaka , Shinohara, Yoko , Kasama, Nobuyuki
IPC分类号： G11B7/00
CPC分类号： G11B7/0937 , G01Q80/00 , G11B7/122 , G11B7/124 , G11B7/1387 , G11B7/22 , G11B11/1058
摘要： The purpose of the invention is to fabricate a near field optical head capable of recording and reading high density information at high speed with excellent mass production. In the invention, stoppers having almost the same height as that of a tip of conical or pyramidal shape are disposed around the tip, a part of a pressing body covering the tip and the stoppers is displaced by an external force, a part of the pressing body having displaced is allowed to come into contact with an opaque film near the point of the tip and thereby an aperture is formed. According to a fabricating method of the invention, multiple apertures can be formed in a block. Thus, the near field optical head is excellent in mass production and the formed aperture has a structure of high optical efficiency and high resolution. Therefore, the near field optical head capable of performing recording/reading in high density and at high speed can be fabricated in excellent mass production.
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8.发明公开Method for forming aperture, near field optical head and method for fabricating the same and information recording/reading apparatus 有权一种生产用于记录的孔，场光学头和制造的方法，装置和再现信息的方法
公开(公告)号：EP1162605A2
公开(公告)日：2001-12-12
申请号：EP01304917.6
申请日：2001-06-05
发明人： Niwa, Takashi , Kato, Kenji , Mitsuoka, Yasuyuki , Oumi, Manabu , Ichihara, Susumu , Maeda, Hidetaka , Shinohara, Yoko , Kasama, Nobuyuki
IPC分类号： G11B7/00
CPC分类号： G11B7/0937 , G01Q80/00 , G11B7/122 , G11B7/124 , G11B7/1387 , G11B7/22 , G11B11/1058
摘要： The purpose of the invention is to fabricate a near field optical head capable of recording and reading high density information at high speed with excellent mass production. In the invention, stoppers having almost the same height as that of a tip of conical or pyramidal shape are disposed around the tip, a part of a pressing body covering the tip and the stoppers is displaced by an external force, a part of the pressing body having displaced is allowed to come into contact with an opaque film near the point of the tip and thereby an aperture is formed. According to a fabricating method of the invention, multiple apertures can be formed in a block. Thus, the near field optical head is excellent in mass production and the formed aperture has a structure of high optical efficiency and high resolution. Therefore, the near field optical head capable of performing recording/reading in high density and at high speed can be fabricated in excellent mass production.
摘要翻译： 本发明的目的是在高速具有优良的批量生产来制造能够记录和读取的高密度信息的近场光学头。 在本发明中，具有几乎相同的高度象锥形或金字塔形的顶端的止动件被围绕尖端，按压体的覆盖尖端的一部分布置，并且所述止动件通过在外力移位时，按压的一部分 具有移位体被允许在不透明电影尖端的点附近接触到，并由此开口被形成。 。根据本发明的制造方法中，多个孔可在一个块中而形成。 因此，近场光学头具有优异的批量生产和所形成的孔具有的高光学效率和高分辨率的结构。 因此，能够执行记录/高密度和高速读出的近场光学头可以在良好的大量生产制造。
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9.发明公开Near-field optical probe and manufacturing method for same, and near-fied optical apparatus using the near-field probe 有权Optische Nahfeldsonde und optisches Scanning-Nahfeld-Mikroskop
公开(公告)号：EP1111426A2
公开(公告)日：2001-06-27
申请号：EP00311436.0
申请日：2000-12-20
发明人： Takashi, Niwa , Kato, Kenji , Kasama, Nobuyuki , Oumi, Manabu , Mitsuoka, Yasuyuki , Ichihara, Susumu
IPC分类号： G02B21/00
摘要： Realized are a near-field optical probe capable of illuminating or/and detecting near-field light great in intensity and acquiring an optical image great in S/N ratio, and a manufacturing method and near-field optical apparatus. Accordingly, a near-field optical probe comprises a cantilever in a cantilever form, a base for supporting the cantilever, a tip in a weight form formed on the cantilever, a microscopic aperture formed in an end of the tip, and a shade film formed on a surface of the cantilever opposite to the base and on area other than the microscopic aperture of the tip. The tip and the cantilever are formed of a transparent material high in transmissivity relative to a wavelength of light to be generated and/or detected by the microscopic aperture, and the tip is structurally filled with the transparent material.
摘要翻译： 实现了能够大幅度地照射或/和检测近场光的近场光学探针，并获得S / N比大的光学图像，以及制造方法和近场光学装置。 因此，近场光学探头包括悬臂形式的悬臂，用于支撑悬臂的基座，形成在悬臂上的重量形式的尖端，形成在尖端的端部的微小孔和形成的遮光膜 在与基座相对的悬臂的表面上以及除了尖端的微小孔之外的区域上。 尖端和悬臂由相对于由微细孔产生和/或检测的光的波长的透射率高的透明材料形成，并且尖端在结构上填充有透明材料。
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公开(公告)号：EP1271497B1
公开(公告)日：2008-12-17
申请号：EP02254357.3
申请日：2002-06-21
发明人： Shinohara, Yoko , Oumi, Manabu , Noboyuki, Kasama , Maeda, Hidetaka , Kato, Kenji , Ichihara, Susumu , Niwa, Takashi , Ohkubo, Toshifumi , Hosaka, Hiroshi , MITSUOKA, Yasayuki , HIROTA, Terunao , ITAO, Kiyoshi
CPC分类号： B82Y10/00 , G11B7/122 , G11B7/124 , G11B7/1387 , G11B7/22
摘要： It is an optical information recording and reading apparatus for recording and/or reading information at a high density by using a near-field light-generating device as a near-field optical head. The end surface of the core 201 of a flexible optical waveguide 103 is formed in an intermediate position in the optical waveguide 103 and in a portion fixed to the near-field optical head 104. Light for recording and reading information is spread within the clad 202. The spread light flux is reflected toward the near-field optical head 104 by a reflective surface 203 formed on the side of one end of the optical waveguide 103. The reflected light flux is collected by light-collecting structures and then is made to enter an optical minute aperture 206 formed in the near-field optical head 104. Near-field light is created near the minute aperture 206. Light scattered by the surface of the recording medium 105 is received. Thus, information on the recording medium 105 can be recorded and read.
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