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公开(公告)号：EP1705475B1
公开(公告)日：2012-08-15
申请号：EP06013102.6
申请日：1998-12-15
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公开(公告)号：EP1705475A3
公开(公告)日：2007-05-02
申请号：EP06013102.6
申请日：1998-12-15
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.
This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.-
3.发明公开Optical waveguide probe and its manufacturing method 有权Optische Wellenleitersonde und deren Herstellungsverfahren。
公开(公告)号：EP1705475A2
公开(公告)日：2006-09-27
申请号：EP06013102.6
申请日：1998-12-15
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.
This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.摘要翻译： 本发明的目的是获得一种形成为钩形的光波导探针，以通过使用硅工艺的制造来照亮和检测光。 该光波导探针形成为钩形，并由在探针针5上被锐化并由电介质构成的光波导1和支撑该光波导1的基板2构成。该光波导1形成在基板2的上方。 光波导1由芯8构成，以透射光和比芯8更小的折射率的包层9。
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4.发明授权Method for forming aperture, near field optical head and method for fabricating the same and information recording/reading apparatus 有权一种生产用于记录的孔，场光学头和制造的方法，装置和再现信息的方法
公开(公告)号：EP1162605B1
公开(公告)日：2007-10-24
申请号：EP01304917.6
申请日：2001-06-05
发明人： Niwa, Takashi , Kato, Kenji , Mitsuoka, Yasuyuki , Oumi, Manabu , Ichihara, Susumu , Maeda, Hidetaka , Shinohara, Yoko , Kasama, Nobuyuki
CPC分类号： G11B7/0937 , G01Q80/00 , G11B7/122 , G11B7/124 , G11B7/1387 , G11B7/22 , G11B11/1058
摘要： The purpose of the invention is to fabricate a near field optical head capable of recording and reading high density information at high speed with excellent mass production. In the invention, stoppers having almost the same height as that of a tip of conical or pyramidal shape are disposed around the tip, a part of a pressing body covering the tip and the stoppers is displaced by an external force, a part of the pressing body having displaced is allowed to come into contact with an opaque film near the point of the tip and thereby an aperture is formed. According to a fabricating method of the invention, multiple apertures can be formed in a block. Thus, the near field optical head is excellent in mass production and the formed aperture has a structure of high optical efficiency and high resolution. Therefore, the near field optical head capable of performing recording/reading in high density and at high speed can be fabricated in excellent mass production.
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公开(公告)号：EP0880043A3
公开(公告)日：1999-02-10
申请号：EP98304109.6
申请日：1998-05-22
CPC分类号： G01N21/21 , G01Q20/02 , G01Q60/06 , G01Q60/22 , Y10S977/862
摘要： In a combined scanning near field optical microscope (Nsom) and atomic force microscope (AFM), an optical fibre probe (1) which has a minute opening on the top of a sharpened tip is brought close to a sample (2), and the probe is moved by a piezo actuator (15) along x- and y-axis directions so that a minute spot beam emanating from the minute opening can scan over the sample. For circular polarisation modulation to be incorporated in the process, a beam is given an optical delay, before it is incident on the optical fibre probe (1), changing at a frequency of p (Hz) by means of a piezo-optical modulator (10). A minute spot beam emanating from the minute opening passes through the sample (2) to be received after passage through the sample (2) to be received after passage through an analyser (5) by a light receiving element (7). The output from the light receiving element (7) is fed to a lock-in amplifier, p- and 2p-components are separated through lock-in rectification, and they are rendered into images by a controller (16). It is used for measuring the distribution of magneto-optical effects.
摘要翻译： 在组合扫描近场光学显微镜（Nsom）和原子力显微镜（AFM）中，在尖锐的顶部具有微小开口的光纤探针（1）靠近样品（2），并且 探头通过压电致动器（15）沿x轴和y轴方向移动，使得从分钟开始发出的微小点光束可以扫描样品。 对于要在该过程中并入的圆偏振调制，在光束入射到光纤探针（1）之前，光束被给予光学延迟，通过压电光调制器以p（Hz）的频率改变 10）。 从微小开口发出的微小光束通过样品（2），在通过样品（2）之后被接收，以便在通过光谱接收元件（7）通过分析器（5）之后被接收。 来自光接收元件（7）的输出被馈送到锁定放大器，p和2p分量通过锁定整流分离，并且它们被控制器（16）渲染成图像。 它用于测量磁光效应的分布。
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公开(公告)号：EP0880043A2
公开(公告)日：1998-11-25
申请号：EP98304109.6
申请日：1998-05-22
CPC分类号： G01N21/21 , G01Q20/02 , G01Q60/06 , G01Q60/22 , Y10S977/862
摘要： In a combined scanning near field optical microscope (Nsom) and atomic force microscope (AFM), an optical fibre probe (1) which has a minute opening on the top of a sharpened tip is brought close to a sample (2), and the probe is moved by a piezo actuator (15) along x- and y-axis directions so that a minute spot beam emanating from the minute opening can scan over the sample. For circular polarisation modulation to be incorporated in the process, a beam is given an optical delay, before it is incident on the optical fibre probe (1), changing at a frequency of p (Hz) by means of a piezo-optical modulator (10). A minute spot beam emanating from the minute opening passes through the sample (2) to be received after passage through the sample (2) to be received after passage through an analyser (5) by a light receiving element (7). The output from the light receiving element (7) is fed to a lock-in amplifier, p- and 2p-components are separated through lock-in rectification, and they are rendered into images by a controller (16). It is used for measuring the distribution of magneto-optical effects.
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7.发明授权OPTICAL MICRO CANTILEVER, METHOD OF MANUFACTURE THEREOF, AND MICRO CANTILEVER HOLDER 有权光学微BOOM，方法本身和MICRO BOOM HOLDER
公开(公告)号：EP1089066B1
公开(公告)日：2008-09-03
申请号：EP00906740.6
申请日：2000-03-06
发明人： Niwa, Takashi , Kato, Kenji , Ichihara, Susumu , Chiba, Norio , Mitsuoka, Yasuyuki , Oumi, Manabu , Kasama, Nobuyuki
摘要： A low-loss optical micro cantilever (10) comprises a support (1), an optical waveguide (2), an opaque film (3), a reflective film (4), a chip (5) with a pointed end, a minute opening (6) in the pointed of the chip (5), and a reflective mirror (7) for directing the light (H) from an optical input/output end (8) of the optical waveguide (2) toward the minute opening (6).
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公开(公告)号：EP1684275A3
公开(公告)日：2007-12-05
申请号：EP06006226.2
申请日：1999-02-22
发明人： Kasama, Nobuyuki , Mitsuoka, Yasuyuki , Chiba, Norio , Niwa, Tahashi , Nakajima, Kunio , Oumi, Manabu , Kato, Kenji , Shinogi, Masataka
IPC分类号： G11B7/135
CPC分类号： G11B7/122 , B82Y10/00 , G11B7/12 , G11B7/124 , G11B7/1387 , G11B7/22 , Y10S977/862
摘要： A near-field optical memory head for recording and/or reproducing information of a recording medium by utilizing near-field light
wherein near-field light forming means having a very small aperture portion (54) for forming near-field light on the recording medium and near-field light detecting means (56) for detecting the formed near-field light are provided on a same substrate (52) and the substrate is constituted to project from a substrate at an outer peripheral portion.摘要翻译： 一种利用近场光记录和/或再现记录介质信息的近场光存储头，其中近场光形成装置具有非常小的孔径部分（54），用于在记录介质上形成近场光 和用于检测所形成的近场光的近场光检测装置（56）设置在同一基板（52）上，并且基板被构造成在外周部分从基板突出。
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公开(公告)号：EP1278205B1
公开(公告)日：2007-08-22
申请号：EP02255008.1
申请日：2002-07-16
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10.发明公开SOM cantilever with hole with tip filling with a projected shape 有权Auslegerfüroptisches Nahfeld-Rastermikroskop
公开(公告)号：EP1531327A1
公开(公告)日：2005-05-18
申请号：EP05003634.2
申请日：1999-11-02
发明人： Niwa, Takashi , Ichihara, Susumu , Mitsuoka, Yasuyuki , Kato, Kenji , Chiba, Norio , Oumi, Manabu , Kasama, Nobuyuki
摘要： There is provided an optical cantilever which is an optical cantilever for SNOM for irradiating and / or detecting light to or from a very small aperture, and is excellent in mass production performance and uniformity and capable of observing even a soft sample at high speed without damaging the sample.
There is provided an optical cantilever characterized in including a base portion 1, a cantilever portion 2 extended from the base portion 1, a light propagating portion 5 of a dielectric member penetrating the cantilever portion 2, formed to project above the cantilever on a side opposed to the base portion and having a sharpened front end and a light propagating tip 3, a light shielding film 6 covering a surrounding of the sharpened dielectric member and a very small aperture 4 formed at the sharpened front end of the dielectric member.摘要翻译： 提供了一种光学悬臂，其是用于向非常小的孔径照射和/或检测光的SNOM的光学悬臂，并且具有优异的批量生产性能和均匀性，并且甚至可以高速地观察软样品而不损坏 例子。 提供了一种光学悬臂，其特征在于包括基部1，从基部1延伸的悬臂部分2，穿透悬臂部分2的电介质构件的光传播部分5，形成为突出在悬臂上方 在与基部相对的一侧上具有锋利的前端和光传播尖端3，覆盖锐化的电介质构件的周围的遮光膜6和形成在电介质构件的尖锐前端的非常小的孔4 。
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