摘要:
A semiconductor layer (14) having a channel formation region (15) provided between a pair of impurity regions (18) spaced from each other is provided, and a first insulating layer (16) a floating gate (20), a second insulating layer (22), and a control gate (24) are provided above the semiconductor layer. The semiconductor material forming the floating gate preferably has a band gap smaller than that of the semiconductor layer. The band gap of a channel formation region in the semiconductor material forming the floating gate is preferably smaller than that of the semiconductor layer by 0.1 eV or more.
摘要:
It is an object to provide a nonvolatile semiconductor memory device with an excellent writing property and charge-retention property. A semiconductor layer (14) including a channel forming region (15) between a pair of impurity regions (18) which are formed to be apart from each other is provided. In an upper layer portion thereof, a first insulating layer (16), a floating gate electrode (20), a second insulating layer (22), and a control gate electrode (24) are provided. The floating gate (20) has at least a two-layer structure, and a first layer (20a) being in contact with the first insulating layer (16) preferably has a band gap smaller than that of the semiconductor layer (14). The stability of the first layer (20a) is improved by formation of a second layer (20b) of the floating gate electrode using a metal, an alloy, or a metal compound material. Such a structure of the floating gate electrode can improve injectability of carriers in writing and a charge-retention property. The first layer (20a) can comprise SiGe.
摘要:
It is an object of the present invention to manufacture, with high yield, a semiconductor device in which an element that has a layer containing an organic compound is provided over a flexible substrate. A method for manufacturing a semiconductor device includes: forming a separation layer over a substrate; forming an element-formed layer over the separation layer by forming an inorganic compound layer, a first conductive layer, and a layer containing an organic compound and forming a second conductive layer which is in contact with the layer containing an organic compound and the inorganic compound layer; and separating the separation layer and the element-formed layer from each other after pasting a first flexible substrate over the second conductive layer.
摘要:
A nonvolatile semiconductor memory device which is superior in writing property and charge holding property, including a semiconductor substrate in which a channel formation region is formed between a pair of impurity regions, and a first insulating layer, a floating gate, a second insulating layer, and a control gate over the semiconductor substrate. The floating gate includes at least two layers. It is preferable that a band gap of a first layer included in the floating gate, which is in contact with the first insulating layer, be smaller than that of the semiconductor substrate. For example, it is preferable that the band gap of the semiconductor material for forming the floating gate be smaller than that of the channel formation region in the semiconductor substrate by 0.1 eV or more. This is because, by lowering the bottom energy level of a conduction band of the floating gate electrode than that of the channel formation region in the semiconductor substrate, a carrier injecting property and a charge holding property are improved.
摘要:
A semiconductor layer (14) having a channel formation region (15) provided between a pair of impurity regions (18) spaced from each other is provided, and a first insulating layer (16) a floating gate (20), a second insulating layer (22), and a control gate (24) are provided above the semiconductor layer. The semiconductor material forming the floating gate preferably has a band gap smaller than that of the semiconductor layer. The band gap of a channel formation region in the semiconductor material forming the floating gate is preferably smaller than that of the semiconductor layer by 0.1 eV or more.
摘要:
It is an object to provide a nonvolatile semiconductor memory device with an excellent writing property and charge-retention property. A semiconductor layer (14) including a channel forming region (15) between a pair of impurity regions (18) which are formed to be apart from each other is provided. In an upper layer portion thereof, a first insulating layer (16), a floating gate electrode (20), a second insulating layer (22), and a control gate electrode (24) are provided. The floating gate (20) has at least a two-layer structure, and a first layer (20a) being in contact with the first insulating layer (16) preferably has a band gap smaller than that of the semiconductor layer (14). The stability of the first layer (20a) is improved by formation of a second layer (20b) of the floating gate electrode using a metal, an alloy, or a metal compound material. Such a structure of the floating gate electrode can improve injectability of carriers in writing and a charge-retention property. The first layer (20a) can comprise SiGe.