公开(公告)号：EP1636845A4

公开(公告)日：2007-08-29

申请号：EP04776276

申请日：2004-06-04

申请人： SEMITOOL INC

发明人： HANSON KYLE ,  DOLECHEK KERT L ,  MCHUGH PAUL R ,  WILSON GREGORY J ,  DAVIS JEFFRY ALAN ,  HARRIS RANDY

IPC分类号： H01L25/00 ,  B65G49/07 ,  C12N15/31 ,  C25D5/08 ,  C25D7/12 ,  C25D17/00 ,  C25D17/06 ,  F26B5/04 ,  H01L20060101

CPC分类号： C25D17/00 ,  C25D5/08 ,  C25D7/12 ,  C25D17/001 ,  C25D17/004 ,  C25D17/008 ,  C25D17/06 ,  H01L21/6704 ,  H01L21/67173 ,  H01L21/67196

摘要： A wet chemical processing chamber comprising a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal contacting the fixed unit and the detachable unit, and a processing component disposed in the fixed unit and/or the detachable unit. The fixed unit can have a first flow system configured to direct a processing fluid through the fixed unit and a mounting fixture for fixedly attaching the fixed unit to a platform or deck of an integrated processing tool. The detachable unit can include a second flow system configured to direct the processing fluid to and/or from the first flow system of the fixed unit. The seal has an orifice through which processing fluid can flow between the first and second flow systems, and the processing component can impart a property to the processing fluid for processing a surface on a microfeature workpiece having submicron microfeatures.