公开(公告)号：EP2544226A4

公开(公告)日：2017-03-29

申请号：EP11750534

申请日：2011-02-24

申请人： SHIN-ETSU POLYMER CO LTD

发明人： OGAWA OSAMU

IPC分类号： H01L21/673 ,  B65D85/86

CPC分类号： H01L21/67379

摘要： To provide a substrate storage container which enables improvement in workability in attaching a transport component to an attachment structure of its container body, can eliminate the risk of the transport component being likely to come off from the attachment structure, and can prevent liquids such as rinsing water and the like from remaining in the attachment structure and transport component. In a substrate storage container, a container body 1 for storing semiconductor wafers has an attachment structure 20 on a roof 2 so that a robotic flange 31 as a transport component 30 is removably attached to attachment structure 20. Attachment structure 20 includes multiple pairs of supporting rails 21 opposing each other, disposed on roof 2, a multiple number of guide pieces 23 provided on roof 2 and interference/engagement parts 24 each formed with guide piece 23. Guide piece 23 and interference/engagement part 24 are combined forming a forked portion 25 in the front part. Transport component 30 includes a main part member 32 supported between multiple pairs of supporting rails 21. Main part member 32 is formed with circulation openings 36 for fluids and incorporates an elastic engagement piece 35 that is elastically deformable so as to interfere with forked portion 25.

摘要翻译： 本发明提供一种能够提高将输送部件安装于容器主体的安装结构时的作业性的基板收纳容器，能够消除输送部件容易从安装结构脱落的风险，并且能够防止冲洗等液体 水等残留在附着结构和传送部件中。 在基板收纳容器中，用于收纳半导体晶圆的容器主体1在车顶2上具有安装结构20，作为输送部件30的机器人用凸缘31以能够装卸的方式安装在安装结构20上。安装结构20具有多对 设置在屋顶2上的彼此相对的导轨21，设置在屋顶2上的多个导向片23和各自形成有导向片23的干涉/接合部24.导向片23和干涉/接合部24组合形成分叉部 25在前面部分。 传送部件30包括支撑在多对支撑导轨21之间的主部件32.主部件32形成有用于流体的循环开口36，并且包括弹性接合件35，该弹性接合件可弹性变形从而与叉状部分25相干涉。

公开(公告)号：EP2537780A4

公开(公告)日：2017-03-22

申请号：EP11744604

申请日：2011-02-14

申请人： SHIN-ETSU POLYMER CO LTD

发明人： FUJIMORI YOSHIAKI ,  OGAWA OSAMU

IPC分类号： B65D85/86 ,  B65D85/00 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67396

摘要： To provide a substrate storage container that can inhibit a container body, door and other parts from being electrified to attract particles, hence can prevent particles from staining substrates. In a substrate storage container which includes: a container body 1 that stores semiconductor wafers W being supported by pairs of left and right supporting pieces 2; a removable door 10 that opens and closes an open front of container body 1; and an interface portions 40 that is provided in container body 1 and door 10 and are connected to a load port apparatus 31 of processing equipment, door 10 is positioned and connected to load port apparatus 31 when the open front of container body 1 is opened and closed by door 10. Container body 1, its paired supporting pieces 2, door 10 and interface portions 40 are all formed of conductive materials so that their surface resistance values are specified to fall within the range of 10 3 to 10 12 Q, to thereby inhibit adherence of particles to these due to electrification of static electricity.