HEAT-DISSIPATING SHEET AND METHOD FOR MANUFACTURING SAME

    公开(公告)号:EP4365939A1

    公开(公告)日:2024-05-08

    申请号:EP22869980.7

    申请日:2022-09-14

    发明人: NAKADA, Kazuya

    摘要: There is provided a heat-dissipating sheet that can achieve low hardness and high thermal conductivity, and a method for manufacturing the same. The present invention relates to a heat-dissipating sheet 1 and a method for manufacturing the same. The heat-dissipating sheet 1 includes a sheet-shaped rubbery elastic body 10, and an elongated thermally conductive filler 20, which has higher thermal conductivity than the rubbery elastic body 10 and is embedded in the rubbery elastic body 10 oriented obliquely with respect to a thickness direction thereof. The rubbery elastic body 10 includes at least one hole 14 that is oriented in parallel to the thickness direction of the rubbery elastic body 10 or obliquely with respect to the thickness direction thereof. The thermally conductive filler 20 has both end portions respectively exposed on surfaces 11 and 12 of the rubbery elastic body 10.

    METHOD OF MANUFACTURING DIAMOND SUBSTRATE
    2.
    发明公开

    公开(公告)号:EP4112787A1

    公开(公告)日:2023-01-04

    申请号:EP22181474.2

    申请日:2022-06-28

    IPC分类号: C30B29/04 B23K26/00 C30B33/06

    摘要: A method of manufacturing a diamond substrate includes: a step of placing a laser condensing unit 190 configured to condense laser light B so as to face an upper surface 10a of a block 10 of single crystal diamond, a step of forming a modified layer 20, which includes a processing mark 21 of graphite and a crack 22b extending along a surface (111) around the processing mark 21, in a partial region of the upper surface 10a of the block 10 along the surface (111) of the single crystal diamond, along the surface (111) of the single crystal diamond at a predetermined depth from the upper surface 10a of the block 10 by radiating the laser light B on the upper surface 10a of the block 10 from the laser condensing unit 190 under predetermined conditions and condensing the laser light B inside the block 10, and moving the laser condensing unit 190 and the block 10 in a relative manner two-dimensionally, and a step of forming a cleavage plane 25 at the predetermined depth of the remaining region of the upper surface 10a of the block 10 by spontaneously propagating cleavage from the modified layer 20.

    COVER BODY AND SUBSTRATE RECEIVING CONTAINER

    公开(公告)号:EP2068357B1

    公开(公告)日:2018-07-18

    申请号:EP07828756.2

    申请日:2007-09-28

    摘要: To provide a door structure and a substrate storage container with which there is less fear that even when the door is manually opened and closed, its parts, accessories and the like are lost, with which particles are unlikely to arise due to vibration, impacts and the like during transportation and with which it does not take long time to dry after washing. A container body 1 for accommodating substrates and a door structure 10 to be detachably fitted into an open front portion 2 of this container body 1 are provided. Door structure 10 is constructed of a casing detachably fitted into open front portion 2 of container body 1, a locking mechanism 14 disposed on the front side of the casing for locking the casing by projecting an engaging claw from the peripheral wall of the casing in a retractable manner as rotary plate 15 is turned so that the claw engages the inner periphery of open front portion 2 of container body 1, a cover plate 22 attached on the front side of the casing to cover the locking mechanism, and operational windows 30 which are formed in cover plate 22 so as to partially oppose rotary plate 15. A manual operating means is provided for rotary plate 15 of locking mechanism 14 at the position opposing operational window 30.

    PUSH-BUTTON SWITCH MEMBER
    7.
    发明公开

    公开(公告)号:EP3327743A1

    公开(公告)日:2018-05-30

    申请号:EP16830202.4

    申请日:2016-06-21

    摘要: [Problem] To provide a pushbutton switch member capable of achieving a favorable operation feeling, a long stroke, and a strong click feeling that should be provided by a dome-shaped movable contact.
    [Solution] The present invention pertains to a pushbutton switch member including: a dome-shaped movable contact; and an operation key disposed on a protrusion side of the movable contact and contacting with the movable contact. Pushing the operation key toward the movable contact causes the movable contact to electrically connect at least two contacts on a substrate. The operation key includes: a key body; a dome part connected with an outer periphery of the key body and deformable by pushing of the key body toward the substrate; a foot part connected with an outer periphery of the dome part and fixed on the substrate; and a protrusion provided on a top surface of the key body or the outer periphery of the key body, protruding from the top surface of the key body, and deformable by compression during operation of pushing the operation key toward the substrate. The movable contact includes: an upper contact part disposed in contact with a site directly below the key body and configured to contact with a contact of the at least two contacts when the key body is pushed in; and an outer fixing part disposed at the upper contact part or outside of the upper contact part in a radial direction and fixed outside of the key body of the operation key in the radial direction.

    CONTAINER FOR STORING PHOTOMASK BLANKS
    10.
    发明公开
    CONTAINER FOR STORING PHOTOMASK BLANKS 有权
    BEHÄLTERZUM AUFBEWAHREN VON BLANKOFOTOMASKEN

    公开(公告)号:EP3045973A4

    公开(公告)日:2017-03-22

    申请号:EP14844507

    申请日:2014-07-24

    IPC分类号: G03F1/66 H01L21/673

    摘要: The purpose of the present invention is to further reliably reduce the contamination of photomask blanks due to the adherence of the dust and particles generated during the storage, transportation, or operation of the container while suppressing the effect on a resist pattern, thereby improving the quality and yield of the photomask blanks. The present invention pertains to a container (1) for storing photomask blanks that stores, transports, or safeguards photomask blanks (2), wherein at least one of the components is constituted by a thermoplastic resin where the amount of caprolactam measured by the dynamic head space method when kept for 60 minutes at 40°C is 0.01 ppm or less n-decane conversion amount per resin weight, and the surface resistance value is no more than 1.0E + 13 ohms.

    摘要翻译: 本发明的目的是为了进一步可靠地减少由于在容器的储存,运输或操作期间产生的灰尘和颗粒的粘附,同时抑制对抗蚀剂图案的影响,从而提高质量,从而可靠地减少光掩模坯料的污染 和光掩模坯料的产率。 本发明涉及一种用于储存,运输或保护光掩模坯料(2)的光掩模坯料的容器(1),其中至少一个部件由热塑性树脂构成,其中由动态头测量的己内酰胺的量 在40℃下保持60分钟时的空间法为每个树脂重量为0.01ppm以下的正癸烷转化量,表面电阻值不大于1.0E + 13欧姆。