公开(公告)号：EP0097282A3

公开(公告)日：1984-07-25

申请号：EP83105619

申请日：1983-06-08

Applicant: SHIPLEY COMPANY INC.

Inventor： Cawston, John D. ,  Becker, Paul E., Jr.

IPC: G03F07/26

CPC classification number: G03F7/322

Abstract: An aqueous metal ion containing developer composition for developing photoresists comprising a metal ion-free alkali and a metal ion-free surfactant that is a quaternary ammonium compound. The developer permits a reduction of from 20 to 50% in the energy necessary to expose the photoresist without deleterious effect on image quality and image resolution.

公开(公告)号：EP0097282A2

公开(公告)日：1984-01-04

申请号：EP83105619.7

申请日：1983-06-08

Applicant: SHIPLEY COMPANY INC.

Inventor： Cawston, John D. ,  Becker, Paul E., Jr.

IPC: G03F7/26

CPC classification number: G03F7/322

Abstract: An aqueous metal ion containing developer composition for developing photoresists comprising a metal ion-free alkali and a metal ion-free surfactant that is a quaternary ammonium compound. The developer permits a reduction of from 20 to 50% in the energy necessary to expose the photoresist without deleterious effect on image quality and image resolution.

Abstract translation: 一种含金属离子的显影剂组合物，用于显影光致抗蚀剂，其包含不含金属离子的碱和作为季铵化合物的无金属离子的表面活性剂。 显影剂允许将曝光光刻胶所需的能量从20％减少到50％，而对图像质量和图像分辨率没有有害影响。

公开(公告)号：EP0062733B1

公开(公告)日：1986-01-02

申请号：EP82100579.0

申请日：1982-01-28

Applicant: SHIPLEY COMPANY INC.

Inventor： Cawston, John D. ,  Becker, Paul E. Jr.

IPC: G03F7/26

CPC classification number: G03F7/322

公开(公告)号：EP0062733A1

公开(公告)日：1982-10-20

申请号：EP82100579.0

申请日：1982-01-28

Applicant: SHIPLEY COMPANY INC.

Inventor： Cawston, John D. ,  Becker, Paul E. Jr.

IPC: G03F7/26

CPC classification number: G03F7/322

Abstract: An aqueous metal ion-free developer composition for developing photoresists comprising a metal ion-free alkali and a metal ion-free surfactant that is quaternary ammonium compound. The developer permits a reduction of from 40-50% in the energy necessary to expose the photoresist without deleterious effect on image quality and image resolution.

Abstract translation: 一种用于显影光致抗蚀剂的无金属离子的显影剂组合物，其包含不含金属离子的碱和作为季铵化合物的无金属离子的表面活性剂。 显影剂允许从曝光光刻胶所需的能量减少40-50％，而不会对图像质量和图像分辨率产生有害影响。