公开(公告)号：EP2545406B1

公开(公告)日：2015-02-11

申请号：EP11709567.9

申请日：2011-03-09

Applicant: SI-Ware Systems

Inventor： HADDARA, Hisham ,  SAADANY, Bassam, A. ,  HAFEZ, Amr, N. ,  MEDHAT, Mostafa

IPC: G01B7/06

CPC classification number: G02B26/0841 ,  G01B7/08 ,  G01B9/02071

公开(公告)号：EP2545406A1

公开(公告)日：2013-01-16

申请号：EP11709567.9

申请日：2011-03-09

Applicant: SI-Ware Systems

Inventor： HADDARA, Hisham ,  SAADANY, Bassam, A. ,  HAFEZ, Amr, N. ,  MEDHAT, Mostafa

IPC: G02B26/08 ,  G01B9/02 ,  G01B7/14

CPC classification number: G02B26/0841 ,  G01B7/08 ,  G01B9/02071

Abstract: A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.

公开(公告)号：EP3390991A1

公开(公告)日：2018-10-24

申请号：EP16719673.2

申请日：2016-04-18

Applicant: SI-Ware Systems

Inventor： ANWAR, Momen ,  MEDHAT, Mostafa ,  MORTADA, Bassem ,  EL SHATER, Ahmed, Othman ,  GAD SEIF, Mina ,  NAGY, Muhammed ,  SAADANY, Bassam, A. ,  HAFEZ, Amr, N.

IPC: G01J3/06 ,  G01B9/02 ,  G01J3/453

CPC classification number: G01J3/4532 ,  G01B9/02051 ,  G01B9/02068 ,  G01J3/06 ,  G01J3/4535 ,  G01J2003/2879

Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self- calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.